Cantilever probe structure for a probe card assembly

Abstract

A probe for a probe card assembly includes a beam and a fulcrum element. The fulcrum element is positioned between a base end portion of the beam and a tip end portion of the beam and is adapted for contact with the beam such that the beam is cantilevered by the fulcrum.

1 . A probe for a probe card assembly comprising: a beam having a base end portion and a tip end portion; and 
 a fulcrum element positioned between the base end portion of the beam and the tip end portion of the beam, the fulcrum element adapted for contact with the beam such that the beam is cantilevered by the fulcrum element.    
   
   
       2 . The probe according to  claim 1 , wherein the base end portion of the beam is coupled to a conductive region of a substrate such that the base end portion of the beam is fixed with respect to the substrate.  
   
   
       3 . The probe according to  claim 2 , wherein the fulcrum element is secured to the substrate.  
   
   
       4 . The probe according to  claim 1 , wherein the beam is coupled to a substrate and wherein at least a portion of the beam is oriented at an oblique angle with respect to a surface of the substrate.  
   
   
       5 . The probe according to  claim 4 , wherein the fulcrum element is adapted for contact with the portion of the beam that is oriented at the oblique angle.  
   
   
       6 . The probe according to  claim 1 , wherein the beam defines a bend adjacent the base end portion of the beam.  
   
   
       7 . The probe according to  claim 1 , wherein the fulcrum element comprises a stud bump secured to a substrate.  
   
   
       8 . The probe according to  claim 1 , wherein the fulcrum element includes a tapered body.  
   
   
       9 . The probe according to  claim 1  further comprising a contact tip adjacent the tip end portion of the beam.  
   
   
       10 . The probe according to  claim 9 , wherein the contact tip comprises a stud bump secured to the beam.  
   
   
       11 . The probe according to  claim 9 , wherein the contact tip comprises a plurality of stud bumps secured to each other in a stacked arrangement.  
   
   
       12 . The probe according to  claim 1 , wherein the beam defines a bend adjacent the tip end portion of the beam.  
   
   
       13 . The probe according to  claim 1  further comprising a post, the post defining a surface to which the base end portion is coupled.  
   
   
       14 . The probe according to  claim 13  wherein the fulcrum element is coupled to the surface of the post.  
   
   
       15 . The probe according to  claim 1 , wherein the beam is coupled to a substrate and wherein the fulcrum element is defined by a tiered portion of the substrate.  
   
   
       16 . The probe according to  claim 1  wherein the fulcrum element is a first fulcrum element, the probe further comprising a second fulcrum element located between the base end portion of the beam and the tip end portion of the beam and spaced from the first fulcrum element, the second fulcrum element adapted for contact with the beam following deflection of the beam from an unloaded beam condition.  
   
   
       17 . A probe card assembly comprising: 
 a substrate defining a surface;    a plurality of probes each including a beam having a base end portion and a tip end portion, the base end portion of the beam being fixed with respect to the surface of the substrate; and    at least one fulcrum element located between the base end portion of the beam of each probe and the tip end portion of the beam, the beam of each probe adapted for contact with one of the at least one fulcrum element such that the beam is cantilevered by the fulcrum element.    
   
   
       18 . The probe card assembly according to  claim 17 , wherein the at least one fulcrum element includes a plurality of fulcrum elements each adapted for contact with a respective one of the beams.  
   
   
       19 . The probe card assembly according to  claim 18 , wherein each of the fulcrum elements comprises a stud bump.  
   
   
       20 . The probe card assembly according to  claim 17 , wherein the surface of the substrate is tiered and wherein the at least one fulcrum element is defined by the tiered surface of the substrate.  
   
   
       21 . The probe card assembly according to  claim 17 , wherein the beam of each of the probes defines a bend adjacent the base end portion of the beam.  
   
   
       22 . The probe card assembly according to  claim 17 , wherein the beam of the each of the probes is coupled to a conductive region of the substrate.  
   
   
       23 . The probe card assembly according to  claim 17 , wherein at least a portion of the beam of each of the probes is oriented at an oblique angle with respect to a surface of the substrate.  
   
   
       24 . The probe card assembly according to  claim 17 , wherein each of the probes includes a contact tip adjacent the tip end portion of the beam.  
   
   
       25 . The probe card assembly according to  claim 17  further comprising at least one post fixed to the surface of the substrate, the base end portion of the beam of each of the probes being coupled to one of the at least one posts such that the base end portion of the beam is fixed with respect to the surface of the substrate.  
   
   
       26 . A probe card assembly comprising: 
 a substrate;    a plurality of probes, each of the probes including a beam including a base end portion and a tip end portion, the beam defining a bend adjacent the base end portion, the base end portion of the beam being fixed with respect to the substrate.    
   
   
       27 . The probe card assembly according to  claim 26 , further comprising a post coupled to a conductive region of the substrate, the base end portion of the beam being coupled to the post such that the base end portion of the beam is fixed with respect to the substrate.