Methods for fabricating fences on interposer substrates

Abstract

A method for modifying or fabricating one or more interposers includes fabricating a fence on a substrate that includes the one or more interposers. The fence may be fabricated on a single surface of the interposer substrate. Alternatively, a fence and associated features may be fabricated on both opposite surfaces of the interposer substrate, for example, by fabricating features on one surface of the substrate, inverting the substrate, and forming features on the opposite surface of the substrate. The fence, a portion thereof, or associated features or portions thereof may be fabricated by selectively consolidating previously unconsolidated material. Such selective consolidation may be effected under control of a program. Additionally, the selective consolidation may occur in conjunction with a machine vision system.

1 . A method for fabricating a plurality of interposers, comprising: 
 selectively consolidating material under control of a program to fabricate at least a portion of at least one fence over at least one interposer substrate of a plurality of interposer substrates, each including a surface to which top contact pads are exposed, the at least one fence including a receptacle through which the top contact pads are exposed, the receptacle being configured to receive a semiconductor device.    
   
   
       2 . The method of  claim 1 , wherein selectively consolidating comprises stereolithography.  
   
   
       3 . The method of  claim 1 , wherein selectively consolidating comprises selectively consolidating material in a plurality of mutually adhered regions.  
   
   
       4 . The method of  claim 1 , further comprising: 
 recognizing a location and orientation of each interposer substrate of the plurality.    
   
   
       5 . The method of  claim 4 , further comprising: 
 storing in computer memory data including at least one physical parameter of each of the plurality of interposer substrates and of the at least one fence; and    using the stored data in conjunction with a machine vision system to recognize a location and orientation of each interposer substrate of the plurality of interposer substrates.    
   
   
       6 . The method of  claim 5 , further comprising: 
 using the stored data, in conjunction with the machine vision system, to effect the act of selectively consolidating at a desired location over the at least one interposer substrate.    
   
   
       7 . The method of  claim 5 , further comprising: using the stored data, in conjunction with the machine vision system, to sequentially form a plurality of mutually adhered regions of the portion of the at least one fence.  
   
   
       8 . The method of  claim 1 , further comprising: positioning each of the plurality of interposer substrates in a common plane.  
   
   
       9 . The method of  claim 1 , further comprising: inverting at least one interposer substrate of the plurality; and fabricating a further portion of the at least one fence.  
   
   
       10 . The method of  claim 9 , wherein fabricating the further portion includes selectively consolidating material under control of a program.  
   
   
       11 . The method of  claim 10 , wherein selectively consolidating comprises stereolithography.  
   
   
       12 . The method of  claim 10 , wherein selectively consolidating comprises selectively consolidating unconsolidated material in a plurality of mutually adhered regions.  
   
   
       13 . The method of  claim 10 , further comprising: recognizing a location and orientation of each interposer substrate of the plurality.  
   
   
       14 . The method of  claim 13 , further comprising: 
 storing in computer memory data including at least one physical parameter of each interposer substrate of the plurality and the at least one fence; and    using the stored data in conjunction with a machine vision system to recognize the location and orientation of each interposer substrate.    
   
   
       15 . The method of  claim 14 , further comprising: 
 using the stored data, in conjunction with the machine vision system, to effect the act of selectively consolidating.    
   
   
       16 . A method for fabricating an interposer, comprising: 
 forming at least a portion of a fence on a first surface of at least one interposer substrate, the fence including a receptacle through which contact pads of the at least one interposer substrate are exposed;    inverting the at least one interposer substrate; and    forming at least a portion of at least one feature on an opposite surface of the interposer substrate.    
   
   
       17 . The method of  claim 16 , wherein forming at least the portion of at least one feature comprises forming at least a portion of a feature comprising an extension of the fence.  
   
   
       18 . The method of  claim 16 , wherein at least one of forming at least the portion of the fence and forming at least the portion of the at least one feature comprises selectively consolidating material under control of a program.  
   
   
       19 . The method of  claim 18 , wherein selectively consolidating is effected in conjunction with a machine vision system configured to recognize an orientation and location of at least one feature of the at least one interposer substrate.  
   
   
       20 . The method of  claim 16 , wherein forming at least a portion of a fence comprises substantially concurrently forming at least portions of a plurality of fences on a plurality of interposer substrates of a common substrate.