Plasma processing apparatus, electrode unit, feeder member and radio frequency feeder rod

Abstract

Disclosed herein is a plasma processing apparatus that introduces a process gas into an airtight processing container, that applies a radio frequency power to generate plasma, and that conducts a plasma process to an object to be processed arranged in the processing container. The plasma processing apparatus includes: an electrode unit arranged in the processing container, the electrode unit having an electrode for applying the radio frequency power, and a space portion arranged in the electrode unit, the space portion insulating the electrode and the processing container from each other. The space portion communicates with atmospheric air outside the processing container.

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       20 . A radio frequency feeder rod that is used for supplying a radio frequency power and that has a flow path of cooling-medium therein, the radio frequency feeder rod comprising 
 an expanding unit that expands an area of absorption of heat by the cooling medium, and    a shielding member that shield the radio frequency feeder rod from an outside thereof.    
   
   
       21 . A radio frequency feeder rod according to  claim 20 , 
 further comprising a plurality of flow paths that extend in parallel.    
   
   
       22 . A radio frequency feeder rod according to  claim 20 , wherein 
 the expanding unit comprises a plurality of protrusions that protrude into the flow path of cooling-medium.    
   
   
       23 . A radio frequency feeder rod according to  claim 22 , wherein 
 the protrusion is finlike formed in an axial direction.    
   
   
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