Self-aligned trench field effect transistors with regrown gates and bipolar junction transistors with regrown base contact regions and methods of making

Abstract

Junction field-effect transistors with vertical channels and self-aligned regrown gates and methods of making these devices are described. The methods use techniques to selectively grow and/or selectively remove semiconductor material to form a p-n junction gate along the sides of the channel and on the bottom of trenches separating source fingers. Methods of making bipolar junction transistors with self-aligned regrown base contact regions and methods of making these devices are also described. The semiconductor devices can be made in silicon carbide.

1 - 29 . (canceled)  
     
     
         30 . A semiconductor device made by a method comprising: 
 disposing a mask on an upper surface of a source/emitter layer of semiconductor material of a first conductivity type, wherein the source/emitter layer is on a channel layer of semiconductor material of the first conductivity type or a base layer of semiconductor material of a second conductivity type different than the first conductivity type, wherein the channel or base layer is on a drift layer of semiconductor material of the first conductivity type and wherein the drift layer is on a semiconductor substrate layer;    selectively etching through the source/emitter layer and into the underlying channel or base layer through openings in the mask to form one or more etched features having bottom surfaces and sidewalls;    epitaxially growing semiconductor material of the second conductivity type on the bottom surfaces and sidewalls of the etched features through openings in the mask to form gate regions/base contact regions wherein the mask inhibits growth on the masked upper surface of the source/emitter layer;    subsequently filling the etched features with a planarizing material;    etching the gate regions/base contact regions until the gate regions/base contact regions no longer contact the source/emitter layer; and    removing mask and planarizing material remaining after etching the gate regions/base contact regions.    
     
     
         31 . The semiconductor device of  claim 30 , wherein the device comprises a channel layer of semiconductor material of the first conductivity type.  
     
     
         32 . The semiconductor device of  claim 30 , wherein the device comprises a base layer of semiconductor material of the second conductivity type.  
     
     
         33 . The semiconductor device of  claim 30 , wherein the etched features comprise a plurality of first elongate regions oriented in a first direction and extending from a second elongate region oriented in a second direction.  
     
     
         34 - 61 . (canceled)  
     
     
         62 . A semiconductor device made by a method comprising: 
 disposing an etch mask on an upper surface of a source/emitter layer of semiconductor material of a first conductivity type, wherein the source/emitter layer is on a channel layer of semiconductor material of the first conductivity type or a base layer of semiconductor material of a second conductivity type different than the first conductivity type, wherein the channel or base layer is on a drift layer of semiconductor material of the first conductivity type and wherein the drift layer is on a semiconductor substrate layer;    selectively etching through the source/emitter layer and into the underlying channel or base layer through openings in the etch mask to form one or more etched features having bottom surfaces and sidewalls;    removing the etch mask to expose the upper surface of the source/emitter layer;    epitaxially growing a gate layer/base contact layer of semiconductor material of the second conductivity type on the upper surface of the source/emitter layer and on the bottom surfaces and sidewalls of the etched features;    subsequently filling the etched features with a first planarizing material;    etching through the gate layer/base contact layer on the upper surface of the source/emitter layer to expose underlying source/emitter layer;    removing first planarizing material remaining after etching through the gate layer/base contact layer;    anisotropically depositing a dry etch mask material on the upper surface of the source/emitter layer and on bottom surfaces of the etched features;    etching the dry etch mask material to expose gate layer/base contact layer on the sidewalls of the etched features adjacent the upper surface of the source/emitter layer;    filling the etched features with a second planarizing material such that the gate layer/base contact layer adjacent the source/emitter layer on the sidewalls of the etched features is exposed;    etching through exposed gate layer/base contact layer on the sidewalls of the etched features adjacent the source/emitter layer to expose underlying source/emitter layer until the gate layer/base contact layer remaining in the etched features no longer contacts the source/emitter layer; and    removing second planarizing material remaining after etching through exposed gate layer/base contact layer on the sidewalls of the etched features.    
     
     
         63 . The semiconductor device of  claim 62 , wherein the device comprises a channel layer of semiconductor material of the first conductivity type.  
     
     
         64 . The semiconductor device of  claim 62 , wherein the device comprises a base layer of semiconductor material of the second conductivity type.  
     
     
         65 . The semiconductor device of  claim 62 , wherein the etched features comprise a plurality of first elongate regions oriented in a first direction and extending from a second elongate region oriented in a second direction.  
     
     
         66 - 97 . (canceled)  
     
     
         98 . A semiconductor device made by a method comprising: 
 disposing an etch mask on an upper surface of a channel layer of semiconductor material of a first conductivity type or a base layer of semiconductor material of a aecond conductivity type different than the first conductivity type, wherein the channel or base layer is on a drift layer of semiconductor material of the first conductivity type and wherein the drift layer is on a semiconductor substrate layer;    selectively etching the channel or base layer through openings in the mask to form one or more etched features having bottom surfaces and sidewalls;    removing the etch mask to expose the upper surface of the channel or base layer;    epitaxially growing a gate layer/base contact layer of semiconductor material of the second conductivity type on the upper surface of the channel or base layer and on the bottom surfaces and sidewalls of the etched features;    subsequently filling the etched features with a first planarizing material;    etching through the gate layer/base contact layer on the upper surface of the channel or base layer such that gate layer/base contact layer remains on the bottom surfaces and sidewalls of the etched features;    removing first planarizing material remaining after etching through the gate layer/base contact layer;    depositing a regrowth mask layer on the upper surface of the channel or base layer and on the gate layer/base contact layer on the bottom surfaces and sidewalls of the etched features;    subsequently filling the etched features with a second planarizing material;    etching through the regrowth mask layer on the upper surface of the channel or base layer to expose underlying channel or base layer, wherein regrowth mask layer remains on the gate layer/base contact layer on the bottom surfaces and sidewalls of the etched features;    removing second planarizing material remaining after etching through the regrowth mask layer;    epitaxially growing a first layer of semiconductor material of the first conductivity type on the upper surface of the channel or base layer, wherein the regrowth mask layer remaining on the gate layer/base contact layer on the bottom surfaces and sidewalls of the etched features inhibits growth of the first layer of semiconductor material of the first conductivity type;    epitaxially growing a second layer of semiconductor material of the first conductivity type on the first layer of semiconductor material of the first conductivity type, wherein the regrowth mask layer remaining on the gate layer/base contact layer on the bottom surfaces and sidewalls of the etched features inhibits growth of the second layer of semiconductor material of the first conductivity type; and    removing remaining regrowth mask layer.    
     
     
         99 . The semiconductor device of  claim 98 , wherein the device comprises a channel layer of semiconductor material of the first conductivity type.  
     
     
         100 . The semiconductor device of  claim 98 , wherein the device comprises a base layer of semiconductor material of the secondctivity type.  
     
     
         101 . The semiconductor device of  claim 98 , wherein the etched features comprise a plurality of first elongate regions oriented in a first direction and extending from a second elongate region oriented in a second direction.  
     
     
         102 - 126 . (canceled)  
     
     
         127 . A semiconductor device made by a method comprising: 
 disposing an etch mask on an upper surface of a source/emitter layer of semiconductor material of a first conductivity type, wherein the source/emitter layer is on a channel layer of semiconductor material of the first conductivity type or a base layer of semiconductor material of a second conductivity type different than the first conductivity type, wherein the channel or base layer is on a drift layer of semiconductor material of the first conductivity type and wherein the drift layer is on a semiconductor substrate layer;    selectively etching through the source/emitter layer and into the underlying channel or base layer through openings in the etch mask to form one or more etched features having bottom surfaces and sidewalls;    removing the etch mask to expose the upper surface of the source/emitter layer;    epitaxially growing a gate layer/base contact layer of semiconductor material of the second conductivity type on the upper surface of the source/emitter layer and on the bottom surfaces and sidewalls of the etched features;    subsequently filling the etched features with a planarizing material;    etching through the gate layer/base contact layer on the upper surface of the source/emitter layer and on the sidewalls of the etched features in contact with the source/emitter layer until the gate layer/base contact layer no longer contacts the source/emitter layer, wherein gate layer/base contact layer remains on the bottom surfaces of the etched features and on the sidewalls of the etched features in contact with the channel or base layer; and    removing planarizing material remaining after etching through the gate layer/base contact layer.    
     
     
         128 . The semiconductor device of  claim 127 , wherein the device comprises a channel layer of semiconductor material of the first conductivity type.  
     
     
         129 . The semiconductor device of  claim 127 , wherein the device comprises a base layer of semiconductor material of the second conductivity type.  
     
     
         130 . The semiconductor device of  claim 127 , wherein the etched features comprise a plurality of first elongate regions oriented in a first direction and extending from a second elongate region oriented in a second direction.  
     
     
         131 - 162 . (canceled)  
     
     
         163 . A semiconductor device made by a method comprising: 
 disposing an etch/regrowth mask on an upper surface of a source/emitter layer of semiconductor material of a first conductivity type, wherein the source/emitter layer is on a channel layer of semiconductor material of the first conductivity type or a base layer of semiconductor material of a second conductivity type different than the first conductivity type, wherein the channel or base layer is on a drift layer of semiconductor material of the first conductivity type and wherein the drift layer is on a semiconductor substrate layer;    selectively etching through the source/emitter layer and into the underlying channel or base layer through openings in the mask to form one or more etched features having bottom surfaces and sidewalls;    epitaxially growing semiconductor material of the second conductivity type on the bottom surfaces and sidewalls of the etched features through openings in the mask to form gate regions/base contact regions wherein the mask inhibits growth on the masked upper surface of the source/emitter layer;    optionally removing the mask to expose the upper surface of the source/emitter layer;    depositing a dry etch mask material on bottom surfaces of the etched features and on either the upper surface of the source/emitter layer or on the mask;    etching the dry etch mask material to expose upper portions of the gate regions/base contact regions on the sidewalls of the etched features;    filling the etched features with a planarizing material such that the upper portions of the gate regions/base contact regions on the sidewalls of the etched features remain exposed;    etching through exposed gate layer/base contact layer on the sidewalls of the etched features adjacent the source/emitter layer to expose underlying source/emitter layer until the gate layer/base contact layer remaining in the etched features no longer contacts the source/emitter layer; and    removing etch/regrowth mask and planarizing material remaining after etching through exposed gate layer/base contact layer on the sidewalls of the etched features.    
     
     
         164 . The semiconductor device of  claim 163 , wherein the device comprises a channel layer of semiconductor material of the first conductivity type.  
     
     
         165 . The semiconductor device of  claim 163 , wherein the device comprises a base layer of semiconductor material of the second conductivity type.  
     
     
         166 . The semiconductor device of  claim 163 , wherein the etched features comprise a plurality of first elongate regions oriented in a first direction and extending from a second elongate region oriented in a second direction.  
     
     
         167 - 168 . (canceled)