Internal member for plasma-treating vessel and method of producing the same

Abstract

It is to propose an internal member for a plasma treating vessel having excellent resistances to chemical corrosion and plasma erosion under an environment containing a halogen gas and an advantageous method of producing the same, which is a member formed by covering a surface of a substrate with a multilayer composite layer consisting of a metal coating formed as an undercoat, Al 2 O 3 film formed on the undercoat as a middle layer and Y 2 O 3 sprayed coating formed on the middle layer as a top coat.

1 . An internal member for a plasma-treating vessel comprising a substrate, a middle layer consisting of a mixture sprayed coating of Al 2 0 3  and Y 2 0 3  covered on a surface of the substrate, and a sprayed coating layer of Y 2 0 3  having a porosity of 0.2-10% covered on a surface of the middle layer.  
     
     
         2 . An internal member for a plasma-treating vessel according to  claim 1 , wherein the substrate is a metal.  
     
     
         3 . An internal member for a plasma-treating vessel according to  claim 2 , wherein the metal is Al or an alloy thereof.  
     
     
         4 . An internal member for a plasma-treating vessel according to  claim 1 , wherein the Y 2 0 3  sprayed coating has a purity of not less than 95 mass %.  
     
     
         5 . An internal member for a plasma-treating vessel comprising a substrate, an undercoat consisting of a sprayed coating of a metal having a strong resistance to corrosion through a halogen gas covered on a surface of the substrate, a middle layer consisting of a mixture sprayed coating of Al 2 0 3  and Y 2 0 3  covered on a surface of the undercoat and a sprayed coating layer of Y 2 0 3  having a porosity of 0.2-10% covered on a surface of the middle layer.  
     
     
         6 . An internal member for a plasma-treating vessel according to  claim 5 , wherein the substrate is a metal.  
     
     
         7 . An internal member for a plasma-treating vessel according to  claim 6 , wherein the metal is Al or an alloy thereof.  
     
     
         8 . An internal member for a Plasma-treating vessel according to  claim 5 , wherein the metal having a strong resistance to corrosion through a halogen gas is a metal selected from Ni and an alloy thereof, W and an alloy thereof, Mo and an alloy thereof, and Ti and an alloy thereof.  
     
     
         9 . An internal member for a plasma-treating vessel according to  claim 5 , wherein the Y 2 0 3  sprayed coating has a purity of not less than 95 mass %.  
     
     
         10 . A method of producing an internal member for a plasma-treating vessel, which comprises spraying a mixed material of Al 2 0 3  and Y 2 0 3  on a surface of a substrate, to form a middle layer consisting of a mixture sprayed coating of Al 2 0 3  and Y 2 0 3 , and spraying Y 2 0 3  on a surface of the middle layer to form a sprayed coating of Y 2 0 3  having a porosity of 0.2-10% on a surface thereof.  
     
     
         11 . A method of producing an internal member for a plasma-treating vessel, which comprises spraying an Al 2 0 3  on a surface of a substrate to form a middle layer consisting of Al 2 0 3 , and spraying Y 2 0 3  on a surface of the middle layer to form a sprayed coating of Y 2 0 3  having a porosity of 0.2-10% on a surface thereof.  
     
     
         12 . A method of producing an internal member for a plasma-treating vessel according to  claim 10 , wherein the substrate is a metal.  
     
     
         13 . A method of producing an internal member for a plasma-treating vessel according to  claim 11 , wherein the substrate is a metal.  
     
     
         14 . A method of producing an internal member for a plasma-treating vessel according to  claim 10 , wherein the metal is Al or an alloy thereof.  
     
     
         15 . An internal member for a plasma-treating vessel according to  claim 10 , wherein the Y 2 0 3  sprayed coating has a purity of not less than 95 mass %.  
     
     
         16 . A method of producing an internal member for a plasma-treating vessel, which comprises spraying an undercoat consisting of a sprayed coating of a metal having a strong resistance to corrosion through a halogen gas on a surface of a substrate, spraying Al 2 0 3  or a mixed material of Al 2 0 3  and Y 2 0 3  on a surface of the undercoat to form a middle layer consisting of a sprayed coating of Al 2 0 3  or a mixed sprayed coating of Al 2 0 3  and Y 2 0 3 , and spraying Y 2 0 3  on a surface of the middle layer to form a sprayed coating of Y 2 0 3  having a porosity of 0.2-10% on a surface thereof.  
     
     
         17 . A method of producing an internal member for a plasma-treating vessel according to  claim 16 , wherein the substrate is a metal.  
     
     
         18 . A method of producing an internal member for a plasma-treating vessel according to  claim 17 , wherein the metal is Al or an alloy thereof.  
     
     
         19 . A method of producing an internal member for a plasma-treating vessel according to  claim 16 , wherein the metal having a strong resistance to corrosion through a halogen gas is a metal selected from Ni and an alloy thereof, W and an alloy thereof, Mo and an alloy thereof, and Ti and an alloy thereof.  
     
     
         20 . A method of producing an internal member for a plasma-treating vessel according to  claim 16 , wherein the Y 2 0 3  sprayed coating has a purity of not less than 95 mass %.  
     
     
         21 . A method of producing an internal member for a plasma-treating vessel according to  claim 11 , wherein the metal is Al or an alloy thereof.  
     
     
         22 . An internal member for a plasma-treating vessel according to  claim 11 , wherein the Y 2 0 3  sprayed coating has a purity of not less than 95 mass %.