Internal member for plasma-treating vessel and method of producing the same

Abstract

It is to propose an internal member for a plasma treating vessel having excellent resistances to chemical corrosion and plasma erosion under an environment containing a halogen gas and an advantageous method of producing the same, which is a member formed by covering a surface of a substrate with a multilayer composite layer consisting of a metal coating formed as an undercoat, Al 2 O 3 film formed on the undercoat as a middle layer and Y 2 O 3 sprayed coating formed on the middle layer as a top coat.

1 . An internal member for a plasma-treating vessel comprising a substrate and a pressure plasma sprayed coating of Y 2 0 3  having a purity of not less than 95 mass % formed on a surface of the substrate through a reduced-pressure plasma spraying process of 50-200 hPa.  
     
     
         2 . An internal member for a plasma-treating vessel according to  claim 1 , wherein an atmosphere in the reduced-pressure plasma spraying is an Ar gas.  
     
     
         3 . An internal member for a plasma-treating vessel according to  claim 1 , which formed an undercoat of a metal sprayed coating between the substrate and the reduced-pressure plasma sprayed coating of Y 2 0 3 .  
     
     
         4 . A method of producing an internal member for a plasma-treating vessel, which comprises covering a high purity Y 2 0 3  plasma sprayed coating on a surface of a substrate under an atmospheric pressure controlled to an atmosphere-pressure of 50-200 hPa to form a reduced-pressure plasma sprayed coating of Y 2 0 3  having a purity of not less than 95 mass % on a surface thereof.  
     
     
         5 . A method of producing an internal member for a plasma-treating vessel according to  claim 4 , wherein an atmosphere in the reduced pressure plasma spraying is an Ar gas.  
     
     
         6 . A method of producing an internal member for a plasma-treating vessel according to  claim 4 , which formed an undercoat of a metal sprayed coating under the reduced-pressure plasma sprayed coating.