High density cantilevered probe for electronic devices

Abstract

Probes for electronic devices are described. The probe is formed by ball bonding a plurality of wires to contact locations on a fan out substrate surface. The wires are cut off leaving stubs. A patterned polymer sheet having electrical conductor patterns therein is disposed over the stubs which extend through holes in the sheet. The ends of the wires are flattened to remit the polymer sheet in place. The wire is connected to an electrical conductor on the polymer sheet which is converted to a contact pad on the polymer sheet. A second wire is ball bonded to the pad on the polymer sheet and cut to leave a second stub. The polymer sheet is laser cut so that each second stub is free to move independently of the other second studs. The ends of the second stubs are disposed against contact locations of an electronic device, such as an FC chip, to test the electronic device.

1 - 53 . (canceled)  
   
   
       54 . A structure for making electrical contact with a plurality of contacts on an electronic component comprising: 
 a first substrate having a first surface;    said first surface having a plurality of contact locations;    a plurality of first electrical conductors extending outward from said contact locations, away from said first surface on said first fan out substrate;    a plurality of flexible electrically conductive beams each having an electrical interconnection location for electrically connection to said plurality of said first electrical conductors;    said flexible electrically conductive beam forms a structure which cantilevers from said electrical interconnection location terminating in a cantilevered end for making electrical contact with said plurality of contacts on said electronic device;    said flexible electrical conductive beam has a bottom surface at least a portion of which is disposed facing and spaced apart from said substrate.    
   
   
       55 - 56 . (canceled)  
   
   
       57 . A structure according to  claim 54 , wherein a raised probe tip is formed at said cantilevered end of said flexible electrically conductive beam, said raised probe tip extends outward from said cantilevered end, away from said first surface of said substrate.  
   
   
       58 . A structure according to  claim 54 , wherein each of said plurality of flexible electrically conductive beams are completely separate from adjacent flexible electrically conductive beams.  
   
   
       59 . A structure according to  claim 57 , wherein the action of mating the plurality of contacts on the electronic device causes said raised contact tip to wipe against said contacts on said electronic device.  
   
   
       60 . A structure according to  claim 57 , wherein said substrate is selected from the group consisting of: 
 a multilayer ceramic substrate with thick film wiring,    a multilayer ceramic substrate with thin firm wiring,    a metallized ceramic substrate with thin film wiring,    an epoxy glass laminate substrates with copper wiring and a silicon substrate with thin film wiring.    
   
   
       61 . A structure according to  claim 57 , wherein a layer of elastomer material is added between said first surface of the substrate and the plurality of flexible electrically conductive beams, said layer of elastomeric material is patterned to be beneath said plurality of flexible electrically conductive beams.  
   
   
       62 . A structure according to  claim 57 , wherein a plated bump is added to at least one of said of flexible electrically conductive beams at said cantilevered end thereof.  
   
   
       63 . A method according to  claim 57 , wherein said raised probe tips are plated pumps.  
   
   
       64 . A method according to  claim 54 , wherein said structures is an electrical connector.  
   
   
       65 . A method according to  claim 54 , wherein said structures is a probe.  
   
   
       66 . A structure according to  claim 54 , wherein a layer of elastomer material is added between said first surface of the substrate and the plurality of flexible electrically conductive beams, said layer of elastomeric material is patterned to be beneath said plurality of flexible electrically conductive beams.  
   
   
       67 . A structure according to  claim 54 , wherein a plated bump is added to at least one of said of flexible electrically conductive beams at said cantilevered end thereof.  
   
   
       68 . A method according to  claim 57 , wherein said raised probe tips are plated pumps.  
   
   
       69 . A method according to  claim 54 , wherein said structures is an electrical connector.