System for generating a set of test patterns for an optical proximity correction algorithm

Abstract

A system of synthesizing layout patterns to test an optical proximity correction algorithm. The method comprises the steps of: embodying Walsh patterns in a set of Walsh pattern matrices; processing groups of matrices from the set of Walsh pattern matrices to form a set of test matrices; mapping the set of test matrices to a test pattern set.

1 . A system for generating a set of test patterns to test an optical proximity correction algorithm, comprising:
 a system that generates a set of Walsh pattern matrices;   a system that processes groups of matrices from the set of Walsh pattern matrices to form a set of test matrices; and   a system that maps the set of test matrices to a test pattern set by mapping matrix entries to tiles in a minimum space, minimum width grid, wherein each tile is assigned a value of either level on or level off.   
   
   
       2 . The system of  claim 1 , wherein the processing system determines a set of combinatorial indices for n choose k matrices, wherein n represents the number of matrices in the set of Walsh pattern matrices, and k is the number of matrices in each group of matrices. 
   
   
       3 . The method of  claim 1 , wherein the mapping system adjusts spacing of tiles when a transition from on to off, or off to on, is detected. 
   
   
       4 . The method of  claim 1 , further comprising a system for pruning the pattern set based on a predetermined set of rules. 
   
   
       3 . A program product stored on a recordable medium for generating a set of test patterns to test an optical proximity correction algorithm, the program product comprising:
 means for generating a set of Walsh pattern matrices;   means for processing groups of matrices from the set of Walsh pattern matrices to form a set of test matrices;   means for mapping the set of test matrices to a test pattern set by mapping matrix entries to tiles in a minimum space, minimum width grid, wherein each tile is assigned a value of either level on or level off.   
   
   
       4 . The program product of  claim 3 , wherein the combining means determines a set of combinatorial indices for n choose k matrices, wherein n represents the number of matrices in the set of Walsh pattern matrices, and k is the number of matrices in each group of matrices. 
   
   
       5 . The program product of  claim 3 , wherein the processing means processes matrices using a Boolean operation. 
   
   
       6 . The program product of  claim 3 , wherein the mapping means adjusts spacing of tiles when a transition from on to off, or off to on, is detected. 
   
   
       7 . The program product of  claim 3 , further comprising means for pruning the pattern set based on a predetermined set of rules.