Batch equipment robots and methods within equipment work-piece transfer for photovoltaic factory

Abstract

The present invention generally comprises equipment for an automated high volume batch work-piece manufacturing factory comprising work-piece handling and work-piece processing in a high productivity factory architecture capable of producing 1,000 or more work-piece an hour. The work-pieces may be presented to the equipment from a stacked supply to a parallel array. Additionally, the work-pieces may be transferred between manufacturing architectures by an array to array batch transfer. The work-pieces may be transferred within the manufacturing architecture in a parallel to parallel batch transfer operation. The robotic operations may be between robotic devices, between robotic devices and processing equipment, and within processing equipment.

1 . A photovoltaic work-piece batch transfer apparatus for transferring photovoltaic work-pieces within a processing tool, comprising:
 a track extending between a plurality of chambers of a processing tool;   a first robot coupled with the track for movement on the track;   a first array end effector disposed on the first robot, the first array end effector having a plurality of first fingers between which one or more work-pieces may be disposed, whereby the first array end effector may translate along the track between a plurality of chambers within the processing tool;   a second robot coupled with the track for movement along the track; and   a second array end effector disposed on the second robot, the second array end effector having a plurality of second fingers and each of the second fingers aligned on a common axis with a corresponding first finger, whereby the second array end effector may translate along the same track as the first array end effector between a plurality of chambers within the processing tool, and whereby the second array end effector and the first array end effector may each translate into a common chamber.   
   
   
       2 . The apparatus of  claim 1 , further comprising:
 a plurality of lift pins capable of raising up to raise the photovoltaic work-pieces from the first array end effector or the second array end effector, the plurality of lift pins disposed within the common chamber.   
   
   
       3 . The apparatus of  claim 2 , wherein the plurality of lift pins are disposed at a location corresponding to an area between adjacent fingers of the plurality of first fingers and the plurality of second fingers. 
   
   
       4 . The apparatus of  claim 1 , wherein the plurality of first fingers are coupled together at a first hand portion of the first array end effector. 
   
   
       5 . The apparatus of  claim 4 , wherein the plurality of first fingers extend above the first hand portion. 
   
   
       6 . The apparatus of  claim 1 , wherein the plurality of second fingers are coupled together at a second hand portion of the second array end effector. 
   
   
       7 . The apparatus of  claim 6 , wherein the plurality of second fingers extend above the second hand portion. 
   
   
       8 . A photovoltaic work-piece transfer method, comprising:
 moving a first array end effector having a plurality of work-pieces disposed thereon from a first load lock chamber into a processing chamber, the first array end effector moving along a track;   elevating the plurality of work-pieces from the first array end effector by raising a plurality of lift pins;   retracting the first array end effector to the first load lock chamber along the track;   moving a second array end effector from a second load lock chamber into the processing chamber along the track;   lowering the plurality of lift pins to dispose the plurality of work-pieces on the second array end effector; and   retracting the second array end effector to the second load lock chamber.   
   
   
       9 . The method of  claim 8 , wherein the track is disposed within both the first load lock chamber and the processing chamber. 
   
   
       10 . The method of  claim 8 , wherein the track is disposed within the first load lock chamber, the second load lock chamber, and the processing chamber. 
   
   
       11 . The method of  claim 10 , wherein the track is linear between the first load lock chamber, the processing chamber, and the second load lock chamber. 
   
   
       12 . The method of  claim 8 , wherein the retracting the second array end effector comprises retracting the second array end effector along the track. 
   
   
       13 . The method of  claim 8 , wherein the first array end effector comprises a plurality of fingers extending therefrom, and wherein each of the plurality of work-pieces is coupled with a plurality of the fingers. 
   
   
       14 . The method of  claim 13 , wherein each of the plurality of fingers are aligned on a common axis with a corresponding finger on the second array end effector. 
   
   
       15 . A photovoltaic work-piece transfer method, comprising:
 moving a first array end effector along a track between a first load lock chamber and a processing chamber, the first array end effector having a plurality of first fingers having a plurality of work-pieces disposed therebetween;   disposing the plurality of work-pieces on a plurality of lift pins in the processing chamber;   retracting the first array end effector from the processing chamber;   moving a second array end effector along the track between a second load lock chamber and the processing chamber, the second array end effector having a plurality of second fingers with each second finger aligned along a common axis with a corresponding first finger;   retrieving the plurality of work-pieces from the plurality of lift pins; and   retracting the second array end effector from the processing chamber.   
   
   
       16 . The method of  claim 15 , wherein the track is disposed within the first load lock chamber, the second load lock chamber, and the processing chamber. 
   
   
       17 . The method of  claim 16 , wherein the track is linear between the first load lock chamber, the processing chamber, and the second load lock chamber. 
   
   
       18 . The method of  claim 15 , wherein the disposing comprises raising the plurality of lift pins to raise the plurality of work-pieces above the plurality of first fingers. 
   
   
       19 . The method of  claim 18 , wherein each work-piece is raised by a plurality of lift pins. 
   
   
       20 . The method of  claim 19 , wherein the plurality of lift pins are disposed at a location corresponding to an area between adjacent fingers of the plurality of first fingers and the plurality of second fingers.