Inventor · disambiguated record
Alexander S. Polyak
Also filed as: POLYAK ALEXANDER · POLYAK ALEXANDER S
19 granted patents·15 pending applications·183 citations·filing 1991–2020
93Inventor score
Files withAPPLIED MATERIALS INC22BACHRACH ROBERT Z3HUNTINGTON MECHANICAL LAB2LAM RES CORP1MUNGEKAR HEMANT P1
Top patents by PatentIndex Score
34 records- 0194US11501957B2Pedestal support design for precise chamber matching and process controlAPPLIED MATERIALS INC·Filed 2020·Granted Nov 15, 2022·4 cites·17 claims
- 0287US10954596B2Temporal atomic layer deposition process chamberAPPLIED MATERIALS INC·Filed 2017·Granted Mar 23, 2021·4 cites·19 claims
- 0387US6939210B2Slurry delivery armAPPLIED MATERIALS INC·Filed 2003·Granted Sep 6, 2005·21 cites·31 claims
- 0484US8899408B2Temperature actuated tensioning mechanismAPPLIED MATERIALS INC·Filed 2013·Granted Dec 2, 2014·3 cites·20 claims
- 0581US7774887B2Scrubber box and methods for using the sameAPPLIED MATERIALS INC·Filed 2008·Granted Aug 17, 2010·6 cites·10 claims
- 0680US7377002B2Scrubber boxAPPLIED MATERIALS INC·Filed 2004·Granted May 27, 2008·20 cites·5 claims
- 0776US7288165B2Pad conditioning head for CMP processAPPLIED MATERIALS INC·Filed 2004·Granted Oct 30, 2007·16 cites·18 claims
- 0873US6080270ACompact microwave downstream plasma systemLAM RES CORP·Filed 1997·Granted Jun 27, 2000·55 cites·60 claims
- 0967US9022715B2Load lock chamber designs for high-throughput processing systemAPPLIED MATERIALS INC·Filed 2013·Granted May 5, 2015·2 cites·12 claims
- 1064US7459056B2Pad conditioning head for CMP processAPPLIED MATERIALS INC·Filed 2007·Granted Dec 2, 2008·1 cites·5 claims
- 1163US11085129B2Device to increase deposition uniformity in spatial ALD processing chamberAPPLIED MATERIALS INC·Filed 2019·Granted Aug 10, 2021·0 cites·20 claims
- 1261US10658223B2Apparatus for prevention of backside deposition in a spatial ALD process chamberAPPLIED MATERIALS INC·Filed 2017·Granted May 19, 2020·0 cites·20 claims
- 1360US5139383ADevice for positioning objects within a sealed chamberHUNTINGTON MECHANICAL LAB·Filed 1991·Granted Aug 18, 1992·35 cites·20 claims
- 1457US10494736B2Device to increase deposition uniformity in spatial ALD processing chamberAPPLIED MATERIALS INC·Filed 2017·Granted Dec 3, 2019·0 cites·20 claims
- 1552US2013059092A1Method and apparatus for gas distribution and plasma application in a linear deposition chamberMUNGEKAR HEMANT P·Filed 2012·Application pending·0 cites
- 1652US2008038998A1Method for processing a substrate using multiple fluid distribtuions on a polishing surfacePOLYAK ALEXANDER S·Filed 2007·Application pending·0 cites
- 1751US2013273262A1Static deposition profile modulation for linear plasma sourceVELLAIKAL MANOJ·Filed 2012·Application pending·0 cites
- 1849US2006079156A1Method for processing a substrate using multiple fluid distributions on a polishing surfaceAPPLIED MATERIALS INC·Filed 2005·Application pending·0 cites
- 1949US2005272352A1Slurry delivery armAPPLIED MATERIALS INC·Filed 2005·Application pending·0 cites
- 2049US2010021273A1Concrete vacuum chamberAPPLIED MATERIALS INC·Filed 2009·Application pending·0 cites
- 2146US2008292433A1Batch equipment robots and methods of array to array work-piece transfer for photovoltaic factoryBACHRACH ROBERT Z·Filed 2007·Application pending·0 cites
- 2244US11798825B2In-situ wafer rotation for carousel processing chambersAPPLIED MATERIALS INC·Filed 2019·Granted Oct 24, 2023·0 cites·13 claims
- 2342US2008279658A1Batch equipment robots and methods within equipment work-piece transfer for photovoltaic factoryBACHRACH ROBERT Z·Filed 2007·Application pending·0 cites
- 2442US2008279672A1Batch equipment robots and methods of stack to array work-piece transfer for photovoltaic factoryBACHRACH ROBERT Z·Filed 2007·Application pending·0 cites
- 2541US2013104996A1Method for balancing gas flow supplying multiple cvd reactorsOH JEONGHOON·Filed 2012·Application pending·0 cites
- 2640US2018155834A1Integrated Atomic Layer Deposition ToolAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
- 2739US10415137B2Non-metallic thermal CVD/ALD Gas Injector and Purge SystemsAPPLIED MATERIALS INC·Filed 2016·Granted Sep 17, 2019·0 cites·10 claims
- 2838US5243867AMechanism for feedthrough of rotary motion to a sealed chamberHUNTINGTON MECHANICAL LAB·Filed 1991·Granted Sep 14, 1993·7 cites·2 claims
- 2938US2013171757A1Advanced platform for passivating crystalline silicon solar cellsPONNEKANTI HARI K·Filed 2013·Application pending·0 cites
- 3037US10959294B2High temperature heater for processing chamberAPPLIED MATERIALS INC·Filed 2016·Granted Mar 23, 2021·0 cites·9 claims
- 3137US2011014396A1Recirculating linear rolling bushingAPPLIED MATERIALS INC·Filed 2010·Application pending·0 cites
- 3236US5207510ALinear ball bearing assemblyPOLYAK ALEXANDER·Filed 1991·Granted May 4, 1993·9 cites·9 claims
- 3336US2011164955A1Processing chamber with translating wear plate for lift pinAPPLIED MATERIALS INC·Filed 2010·Application pending·0 cites
- 3436US2011033620A1Compound lift pin tip with temperature compensated attachment featureAPPLIED MATERIALS INC·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →