Process chamber and load-lock split frame construction

Abstract

The present invention generally relates to a split frame assembly for supporting a chamber in a processing system. In order to adequately fit into the body of an airplane for transport, the frame may be split into two pieces. Once split, each piece may individually be loaded onto the airplane. The upper piece may comprise all of the various components necessary to operate the chamber including gas panels, control panels, or other panels. The lower piece may support the upper piece.

1 . A split frame chamber support, comprising:
 a lower frame having a plurality of first supporting posts;   one or more aligning mechanisms coupled with one or more first supporting posts;   one or more first flanges protruding from and coupled with one or more of the first supporting posts; and   an upper frame coupled with the lower frame.   
   
   
       2 . The support of  claim 1 , wherein each first supporting post comprises a center axis and where each aligning mechanism comprises two upwardly extending flanges that protrude from each first supporting post at an angle relative to the center axis. 
   
   
       3 . The support of  claim 1 , wherein the upper frame further comprises one or more second flanges coupled with the one or more first flanges. 
   
   
       4 . The support of  claim 3 , further comprising:
 one or more fastening mechanisms extending through the one or more first flanges and the one or more second flanges.   
   
   
       5 . The support of  claim 4 , wherein the one or more second flanges has threaded openings therethrough for receiving the one or more fastening mechanisms. 
   
   
       6 . The support of  claim 1 , wherein the upper frame further comprises a plurality of second supporting posts, and wherein at least one second support post has at least three connection rails coupled thereto with each connection rail coupled at a different elevation. 
   
   
       7 . The support of  claim 1 , wherein each first supporting posts has a center axis and wherein the one or more first flanges extend from the first supporting posts perpendicular to the center axis. 
   
   
       8 . An apparatus, comprising:
 a lower frame having a plurality of first supporting posts;   one or more aligning mechanisms coupled with one or more first supporting posts;   one or more first flanges protruding from and coupled with one or more of the first supporting posts;   an upper frame coupled with the lower frame; and   a chamber coupled with the upper frame.   
   
   
       9 . The apparatus of  claim 8 , wherein the chamber comprises a processing chamber, a load lock chamber, or a transfer chamber. 
   
   
       10 . The apparatus of  claim 9 , wherein the processing chamber comprises a plasma enhanced chemical vapor deposition chamber or a physical vapor deposition chamber. 
   
   
       11 . The apparatus of  claim 8 , wherein each first supporting post comprises a center axis and where each aligning mechanism comprises two upwardly extending flanges that protrude from each first supporting post at an angle relative to the center axis. 
   
   
       12 . The apparatus of  claim 8 , wherein the upper frame further comprises one or more second flanges coupled with the one or more first flanges. 
   
   
       13 . The apparatus of  claim 12 , wherein further comprising:
 one or more fastening mechanisms extending through the one or more first flanges and the one or more second flanges.   
   
   
       14 . The apparatus of  claim 8 , wherein each first supporting posts has a center axis and wherein the one or more first flanges extend from the first supporting posts perpendicular to the center axis. 
   
   
       15 . The apparatus of  claim 8 , wherein the upper frame further comprises a plurality of second supporting posts, and wherein at least one second support post has at least three connection rails coupled thereto with each connection rail coupled at a different elevation. 
   
   
       16 . The apparatus of  claim 8 , further comprising:
 a gas panel disposed within the upper frame.   
   
   
       17 . The apparatus of  claim 8 , further comprising:
 a control panel disposed within the upper frame.   
   
   
       18 . A split frame support, comprising:
 a lower frame, the lower frame comprising:
 a plurality of first supporting posts extending along parallel center axis; 
 one or more first connection rails extending between adjacent first supporting posts, the one or more of the first connection rails detachably coupled with two of the first supporting posts; 
 a coupling flange coupled with each first supporting post, the coupling flange extending perpendicular to the center axis; and 
 one or more alignment mechanisms, the alignment mechanisms coupled to a first supporting post and extending from the first supporting post at an angle relative to the center axis; and 
   an upper frame coupled to the lower frame, the upper frame comprising:
 a plurality of second supporting posts each extending along separate second center axis equal to a center axis of a corresponding center axis of a first supporting post, at least one second support post has at least three second connection rails coupled thereto with each second connection rail coupled at a different elevation. 
   
   
   
       19 . The support of  claim 18 , wherein the upper frame further comprises one or more second flanges coupled with the one or more first flanges. 
   
   
       20 . The support of  claim 19 , wherein the one or more second flanges has threaded openings therethrough for receiving the one or more fastening mechanisms.