Inventor · disambiguated record
Robin L. Tiner
Also filed as: TINER ROBIN · TINER ROBIN L
61 granted patents·37 pending applications·2,572 citations·filing 1998–2024
99Inventor score
Top patents by PatentIndex Score
98 records- 0199USD784276SSusceptor assemblyAPPLIED MATERIALS INC·Filed 2013·Granted Apr 18, 2017·333 cites·1 claims
- 0299US8074599B2Plasma uniformity control by gas diffuser curvatureCHOI SOO YOUNG·Filed 2005·Granted Dec 13, 2011·253 cites·33 claims
- 0398US8992723B2RF bus and RF return bus for plasma chamber electrodeSORENSEN CARL A·Filed 2010·Granted Mar 31, 2015·157 cites·7 claims
- 0498US8721791B2Showerhead support structure for improved gas flowTINER ROBIN L·Filed 2011·Granted May 13, 2014·516 cites·15 claims
- 0598US8083853B2Plasma uniformity control by gas diffuser hole designCHOI SOO YOUNG·Filed 2004·Granted Dec 27, 2011·753 cites·106 claims
- 0696US9382621B2Ground return for plasma processesCHOI SOO YOUNG·Filed 2010·Granted Jul 5, 2016·27 cites·33 claims
- 0795US7429410B2Diffuser gravity supportAPPLIED MATERIALS INC·Filed 2005·Granted Sep 30, 2008·32 cites·15 claims
- 0894US6213704B1Method and apparatus for substrate transfer and processingAPPLIED KOMATSU TECHNOLOGY INC·Filed 1998·Granted Apr 10, 2001·144 cites·27 claims
- 0993US8075690B2Diffuser gravity supportKELLER ERNST·Filed 2008·Granted Dec 13, 2011·24 cites·12 claims
- 1091US10262837B2Plasma uniformity control by gas diffuser hole designAPPLIED MATERIALS INC·Filed 2015·Granted Apr 16, 2019·5 cites·14 claims
- 1190US8147614B2Multi-gas flow diffuserWHITE JOHN M·Filed 2010·Granted Apr 3, 2012·5 cites·12 claims
- 1290US6746198B2Substrate transfer shuttleAPPLIED MATERIALS INC·Filed 2001·Granted Jun 8, 2004·42 cites·21 claims
- 1388US10487401B2Diffuser temperature controlAPPLIED MATERIALS INC·Filed 2016·Granted Nov 26, 2019·4 cites·13 claims
- 1488US9200368B2Plasma uniformity control by gas diffuser hole designCHOI SOO YOUNG·Filed 2011·Granted Dec 1, 2015·6 cites·95 claims
- 1588US6517303B1Substrate transfer shuttleAPPLIED KOMATSU TECHNOLOGY INC·Filed 1998·Granted Feb 11, 2003·79 cites·38 claims
- 1686US9068262B2Tightly fitted ceramic insulator on large area electrodeKUDELA JOZEF·Filed 2011·Granted Jun 30, 2015·6 cites·16 claims
- 1785US10087524B2Showerhead support structure for improved gas flowAPPLIED MATERIALS INC·Filed 2014·Granted Oct 2, 2018·5 cites·20 claims
- 1885US9677177B2Substrate support with quadrantsAPPLIED MATERIALS INC·Filed 2014·Granted Jun 13, 2017·6 cites·19 claims
- 1984US10312058B2Plasma uniformity control by gas diffuser hole designAPPLIED MATERIALS INC·Filed 2017·Granted Jun 4, 2019·3 cites·20 claims
- 2084US9187827B2Substrate support with ceramic insulationAPPLIED MATERIALS INC·Filed 2013·Granted Nov 17, 2015·2 cites·11 claims
- 2184US7534301B2RF grounding of cathode in process chamberAPPLIED MATERIALS INC·Filed 2004·Granted May 19, 2009·17 cites·35 claims
- 2283US8381677B2Prevention of film deposition on PECVD process chamber wallAPPLIED MATERIALS INC·Filed 2007·Granted Feb 26, 2013·6 cites·24 claims
- 2382US9580804B2Diffuser supportWHITE JOHN M·Filed 2010·Granted Feb 28, 2017·3 cites·19 claims
- 2480US9758869B2Anodized showerheadCHOI SOO YOUNG·Filed 2010·Granted Sep 12, 2017·4 cites·23 claims
- 2579US10123379B2Substrate support with quadrantsAPPLIED MATERIALS INC·Filed 2017·Granted Nov 6, 2018·2 cites·15 claims
- 2679US8281739B2RF shutterTINER ROBIN L·Filed 2008·Granted Oct 9, 2012·5 cites·12 claims
- 2778US8733279B2PECVD process chamber backing plate reinforcementWHITE JOHN M·Filed 2008·Granted May 27, 2014·4 cites·19 claims
- 2877US10883174B2Gas diffuser mounting plate for reduced particle generationAPPLIED MATERIALS INC·Filed 2018·Granted Jan 5, 2021·2 cites·20 claims
- 2977USD701329SSubstrate supportTINER ROBIN L·Filed 2012·Granted Mar 18, 2014·21 cites·1 claims
- 3077US8365682B2Methods and apparatus for supporting substratesAPPLIED MATERIALS INC·Filed 2005·Granted Feb 5, 2013·5 cites·9 claims
- 3175USD664249SFlow blocker plateWANG QUNHUA·Filed 2011·Granted Jul 24, 2012·21 cites·1 claims
- 3272US8853098B2Substrate support with gas introduction openingsKIM SAM H·Filed 2012·Granted Oct 7, 2014·2 cites·19 claims
- 3372US2025046578A1Deposition chamber system diffuser with increased power efficiencyAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 3469US10927461B2Gas diffuser support structure for reduced particle generationAPPLIED MATERIALS INC·Filed 2018·Granted Feb 23, 2021·0 cites·20 claims
- 3569US10468221B2Shadow frame with sides having a varied profile for improved deposition uniformityAPPLIED MATERIALS INC·Filed 2018·Granted Nov 5, 2019·0 cites·20 claims
- 3667US2009283039A1Robust outlet plumbing for high power flow remote plasma sourceAPPLIED MATERIALS INC·Filed 2009·Application pending·0 cites
- 3765US2009114153A1Method and apparatus for sealing an opening of a processing chamberAPPLIED MATERIALS INC·Filed 2008·Application pending·0 cites
- 3864US9458538B2Method and apparatus for sealing an opening of a processing chamberKURITA SHINICHI·Filed 2012·Granted Oct 4, 2016·0 cites·9 claims
- 3964US2013140009A1Robust outlet plumbing for high power flow remote plasma sourceWHITE JOHN M·Filed 2012·Application pending·0 cites
- 4061US12140168B2Flat head units for heavy load alignmentAPPLIED MATERIALS INC·Filed 2021·Granted Nov 12, 2024·0 cites·20 claims
- 4161US12136538B2Deposition chamber system diffuser with increased power efficiencyAPPLIED MATERIALS INC·Filed 2021·Granted Nov 5, 2024·0 cites·15 claims
- 4261US11123837B2Method of removal of sharp corners from diffuser plateAPPLIED MATERIALS INC·Filed 2017·Granted Sep 21, 2021·0 cites·23 claims
- 4361US6554907B2Susceptor with internal supportAPPLIED MATERIALS INC·Filed 2001·Granted Apr 29, 2003·7 cites·24 claims
- 4461US2009178617A1Rf grounding of cathode in process chamberWHITE JOHN M·Filed 2009·Application pending·0 cites
- 4560US2010122655A1Ball supported shadow frameTINER ROBIN L·Filed 2009·Application pending·0 cites
- 4658USD680946SGas flow diffuser faceplateANWAR SUHAIL·Filed 2010·Granted Apr 30, 2013·11 cites·1 claims
- 4758US2016032451A1Remote plasma clean source feed between backing plate and diffuserAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
- 4858US2009071403A1Pecvd process chamber with cooled backing plateCHOI SOO YOUNG·Filed 2008·Application pending·0 cites
- 4958US2010089319A1Rf return path for large plasma processing chamberAPPLIED MATERIALS INC·Filed 2009·Application pending·0 cites
- 5058US2009107955A1Offset liner for chamber evacuationTINER ROBIN L·Filed 2008·Application pending·0 cites
Showing the top 50 of 98 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →