Robust outlet plumbing for high power flow remote plasma source

Abstract

The present invention generally includes a coupling between components. When igniting a plasma remote from a processing chamber, the reactive gas ions may travel to the processing chamber through numerous components. The reactive gas ions may be quite hot and cause the various components to become very hot and thus, the seals between apparatus components may fail. Therefore, it may be beneficial to cool any metallic components through which the reactive gas ions may travel. However, at the interface between the cooled metallic component and a ceramic component, the ceramic component may experience a temperature gradient sufficient to crack the ceramic material due to the heat of the reactive gas ions and the coolness of the metallic component. Therefore, extending a flange of the metallic component into the ceramic component may lessen the temperature gradient at the interface and reduce cracking of the ceramic component.

1 . A method, comprising:
 igniting a plasma in a remote plasma source;   flowing reactive gas ions from the remote plasma source through a cooling block having a flange made of a first material and a gas tube made of a second material different than the first material, wherein the cooling block flange extends outwardly from the cooling block and is contained at least partially within the gas tube; and   flowing a cooling fluid through the cooling block while flowing the reactive gas ions therethrough.   
     
     
         2 . The method of  claim 1 , wherein the first material comprises stainless steel. 
     
     
         3 . The method of  claim 2 , wherein the second material comprises ceramic. 
     
     
         4 . The method of  claim 2 , wherein the gas tube has a first inner diameter and a second inner diameter different than the first inner diameter, and wherein the flange has a third inner diameter substantially equal to the first inner diameter. 
     
     
         5 . The method of  claim 4 , wherein the gas tube is coupled with an end block at an end opposite to the cooling block, and wherein the end block flange extends at least partially into the gas tube. 
     
     
         6 . The method of  claim 1 , wherein the second material comprises ceramic. 
     
     
         7 . The method of  claim 6 , wherein the gas tube has a first inner diameter and a second inner diameter different than the first inner diameter, and wherein the flange has a third inner diameter substantially equal to the first inner diameter. 
     
     
         8 . The method of  claim 7 , wherein the gas tube is coupled with an end block at an end opposite to the cooling block, and wherein the end block flange extends at least partially into the gas tube. 
     
     
         9 . The method of  claim 1 , wherein the first material comprises aluminum. 
     
     
         10 . The method of  claim 9 , wherein the second material comprises ceramic. 
     
     
         11 . The method of  claim 10 , wherein the gas tube has a first inner diameter and a second inner diameter different than the first inner diameter, and wherein the flange has a third inner diameter substantially equal to the first inner diameter. 
     
     
         12 . The method of  claim 11 , wherein the gas tube is coupled with an end block at an end opposite to the cooling block, and wherein the end block flange extends at least partially into the gas tube. 
     
     
         13 . The method of  claim 1 , wherein the gas tube is contained in a resistor 
     
     
         14 . The method of  claim 13 , wherein the resistor is electrically coupled to a power source. 
     
     
         15 . The method of  claim 14 , wherein the resistor is electrically coupled to ground. 
     
     
         16 . The method of  claim 15 , wherein the resistor comprises a ceramic material. 
     
     
         17 . A method, comprising:
 igniting a plasma in a remote plasma source;   flowing the reactive gas ions from the remote plasma source through a cooling block made of a first material and a gas tube made of a second material different than the first material, wherein the cooling block extends at least partially into the gas tube; and   flowing a cooling fluid through the cooling block while flowing the reactive gas ions therethrough.   
     
     
         18 . The method of  claim 17 , wherein the first material comprises stainless steel. 
     
     
         19 . The method of  claim 18 , wherein the second material comprises ceramic. 
     
     
         20 . The method of  claim 17 , wherein the second material comprises ceramic.