Method and arrangement for positioning a probe card

Abstract

A method for perpendicular positioning of a probe card relative to a test substrate, includes storing a separation position approached in a first positioning step as a distance between the needle tips of the probe card and the substrate, storing a contact position approached in a second positioning step until the probe card contacts the substrate, and displaying an image of the needle tips. For avoiding erroneous operation after a probe card has been changed, when imaging the needle tips, the stored contact position is imaged and is changed until presentation of this contact position corresponds to actual height of the tips appropriate for the respective probe card and this setting is then stored as a new contact position. A display device presents the needle tips and the stored contact position and is connected to a memory, a recording device and an input device which changes the contact position.

1 . Method for positioning a probe card with probe needles, which needles have needle tips, relative to a surface of a substrate to be tested in a direction perpendicular to the surface of the substrate, a first position of the needle tips relative to the surface of the substrate being measured and stored as a separation position in such a manner that the separation point is approached in a first positioning step, which step does not measure the distance between the needle tips and the surface of the substrate, so as to produce a distance between the needle tips and the surface of the substrate, a second position of the needle tips relative to the surface of the substrate being measured and stored as a contact position in such a manner that the contact position is approached in a second positioning step, which second step does not measure the distance between the needle tips and the surface of the substrate, until the needle tips make contact with the surface of the substrate, an image of the needle tips being recorded along at least one horizontal imaging direction, which direction is essentially parallel to the surface of the substrate, and being displayed, and, when imaging the needle tips, the stored contact position is imaged or an absolute height of the needle tips which corresponds to the stored contact position is imaged, the imaged contact position or the imaged absolute height of the needle tips is changed until presentation of these positions corresponds to a height of the needle tips which is appropriate for the respective probe card or corresponds to an appropriate height of the contact position and this contact position which has been set is then stored as a new contact position or the corresponding contact position is calculated from set height of the contacts and is stored. 
   
   
       2 . Method according to  claim 1 , wherein the height of the separation position is calculated from the stored contact position or is calculated using the stored height of the needle tips over a predefined distance and is stored. 
   
   
       3 . Method according to  claim 1 , wherein, when imaging the needle tips, the stored separation position is imaged, and the stored separation position is changed until the presentation of these positions corresponds to the height of the separation position which is appropriate for the respective probe card and this separation position which has been set is then stored as a new separation position. 
   
   
       4 . Method according to  claim 1 , wherein removal of the probe card from a probe card holder is detected and the stored contact position is presented when removal has been determined. 
   
   
       5 . Method according to  claim 4 , wherein removal of the probe card is detected if a distance between the probe card and the probe card holder is exceeded. 
   
   
       6 . Method according to  claim 1 , wherein position of the needle tips is electronically determined from the imaging of the needle tips and is stored. 
   
   
       7 . Method according to  claim 6 , wherein the contact position is calculated from the stored position of the needle tips and is stored. 
   
   
       8 . Method according to  claim 7 , wherein the separation position is calculated from the stored position of the needle tips or from the calculated contact position and is stored. 
   
   
       9 . Method according to  claim 4 , wherein, when removal is detected, an error signal is output if a defined difference between the position of the needle tips and the stored contact position is exceeded. 
   
   
       10 . Arrangement for positioning a probe card with probe needles, which needles have needle tips and are arranged on the probe card such that the needles are oriented in position, comprising a substrate holder, a setting device for adjusting the substrate holder relative to the probe card, a recording device with a recording axis directed at the probe needles and essentially parallel to a surface of the substrate, the setting device including a drive device having a memory that stores a contact position and a separation position, and a display device that presents the needle tips and the stored contact position and is connected to the memory and to a recording device and has an input means which changes the contact position. 
   
   
       11 . Arrangement according to  claim 10 , further comprising means which detects removal of the probe card and is connected to the recording device. 
   
   
       12 . Arrangement according to  claim 11 , further comprising means which detects distance between the probe card and a probe card holder. 
   
   
       13 . Arrangement according to  claim 11 , wherein an opening which is connected to a compressed air source or to a vacuum source by a pressure line is arranged in the probe card holder, said opening being closed when the probe card is inserted in the probe card holder and being open when the probe card has been removed, and the pressure line is connected to a pressure measuring device which detects a pressure difference in the pressure line and, is connected to an evaluation unit which determines a pressure difference. 
   
   
       14 . Arrangement according to  claim 13 , wherein the probe card holder is provided with a sliding piece which locks the probe card and has a position which unlocks the probe card and in which the opening is open and a position which locks the probe card and in which the opening is closed.