Outside Air Shut-Off Container and Pressure-Reducible Processing Apparatus

Abstract

Because an O-ring of synthetic resin is pyrolyzed in the atmosphere at a high temperature of 150° C. or more, the airtightness cannot be maintained. In an outside air shut-off container according to the present invention, an inert gas is supplied between an O-ring, which hermetically seals a process chamber and a cover member, and the outside air while a gas passage formed between the O-ring and the outside air is covered with a sealing cover. Additionally, an aluminum oxide layer is formed on a contact surface of the O-ring to increase the pyrolysis temperature of the O-ring.

1 . An outside air shut-off container comprising:
 a chamber;   a cover member mounted on the chamber; and   a hermetically sealing mechanism portion for hermetically sealing the chamber and the cover member, the hermetically sealing mechanism portion having:
 a gas passage defined between the chamber and the cover member, and 
 a sealing portion for sealing the gas passage, the sealing portion including an O-ring and a sealing cover provided between the O-ring and outside air. 
   
     
     
         2 . The outside air shut-off container as recited in  claim 1 , wherein the O-ring is made of resin. 
     
     
         3 . The outside air shut-off container as recited in  claim 2 , further comprising:
 at least one inlet for supplying an inert gas to the gas passage between the O-ring and the sealing cover; and   at least one outlet for discharging the inert gas from the gas passage between the O-ring and the sealing cover.   
     
     
         4 . The outside air shut-off container as recited in  claim 2 , further comprising:
 a plurality of inlets for supplying an inert gas to the gas passage between the O-ring and the sealing cover; and   a plurality of outlets for discharging the inert gas from the gas passage between the O-ring and the sealing cover.   
     
     
         5 . The outside air shut-off container as recited in  claim 1 , wherein the O-ring is compressed at a compressibility of 10% to 30%. 
     
     
         6 . A pressure-reducible processing apparatus comprising:
 a process chamber having a processing space defined therein;   a cover member mounted on the process chamber; and   a hermetically sealing mechanism portion for hermetically sealing the process chamber and the cover member, the hermetically sealing mechanism portion having:
 a gas passage defined between the process chamber and the cover member, 
 an O-ring made of synthetic resin for sealing the gas passage, and 
 an aluminum oxide layer formed at least in an area of the gas passage with which the O-ring is brought into contact. 
   
     
     
         7 . The pressure-reducible processing apparatus as recited in  claim 6 , wherein the aluminum oxide layer comprises an anodized film produced by anodizing a surface of the process chamber made of aluminum alloy with a nonaqueous solvent. 
     
     
         8 . The pressure-reducible processing apparatus as recited in  claim 6 , wherein the aluminum oxide layer comprises a protective film of aluminum oxide formed on a surface of stainless steel containing aluminum. 
     
     
         9 . The pressure-reducible processing apparatus as recited in  claim 6 , wherein the O-ring is made of synthetic resin of perfluoroelastomer. 
     
     
         10 . The pressure-reducible processing apparatus as recited in  claim 6 , wherein the hermetically sealing mechanism portion has a sealing cover provided between the O-ring and outside air. 
     
     
         11 . The pressure-reducible processing apparatus as recited in  claim 6 , wherein the O-ring is compressed at a compressibility of 10% to 30%.