Method for producing abrasive grains, method for producing slurry, and method for producing polishing liquid

Abstract

In the production method for abrasive grains according to the invention, an aqueous solution of a salt of a tetravalent metal element is mixed with an alkali solution, under conditions such that a prescribed parameter is 5.00 or greater, to obtain abrasive grains including a hydroxide of the tetravalent metal element.

1 - 15 . (canceled) 
     
     
         16 . A production method for abrasive grains, wherein a first liquid which is an aqueous solution of a salt of a tetravalent metal element is mixed with a second liquid which is an alkali solution, under conditions such that parameter Z in the following formula (1a) is 5.00 or greater, to yield abrasive grains including a hydroxide of the tetravalent metal element.
     Z=[ 1/(ΔpH× k )]×( N/M )/1000  (1a)
   
       [In formula (1a), ΔpH represents a variation in pH per minute in a reaction system, k represents a reaction temperature coefficient represented by the following formula (2), N represents a cycle count (min −1 ), and M represents a substitution count (min −1 ) represented by the following formula (5).]
     k= 2 [(T-20)/10]   (2)
 
 [In formula (2), T represents a temperature (° C.) of the reaction system.]
     M=v/Q   (5)
 
 
 
       [In formula (5), v represents a mixing rate (m 3 /min) of the first liquid and the second liquid, and Q represents a liquid volume (m 3 ) of the liquid mixture.] 
     
     
         17 . The production method according to  claim 16 , wherein the ΔpH is not greater than 5.00. 
     
     
         18 . The production method according to  claim 16 , wherein the cycle count N is 1.00 min −1  or greater. 
     
     
         19 . The production method according to  claim 16 , wherein the substitution count M is not greater than 1.0 min −1 . 
     
     
         20 . The production method according to  claim 16 , wherein a base of the alkali solution is a nitrogen-containing heterocyclic organic base. 
     
     
         21 . The production method according to  claim 16 , wherein the mixing rate v is not greater than 1.00×10 −2  m 3 /min. 
     
     
         22 . The production method according to  claim 16 , wherein the temperature T is not higher than 60° C. 
     
     
         23 . The production method according to  claim 16 , wherein a concentration of the salt of a tetravalent metal element is the first liquid is 0.01 mol/L or greater. 
     
     
         24 . The production method according to  claim 16 , wherein an alkaline concentration of the second liquid is not greater than 15.0 mol/L. 
     
     
         25 . The production method according to  claim 16 , wherein a pH of the liquid mixture is 2.0 to 7.0. 
     
     
         26 . The production method according to  claim 16 , wherein the tetravalent metal element is tetravalent cerium. 
     
     
         27 . A production method for a slurry, wherein abrasive grains obtained by the production method according to  claim 16  are mixed with water to obtain a slurry. 
     
     
         28 . A production method for a polishing liquid, wherein a slurry obtained by the production method according to  claim 27  is mixed with an additive to obtain a polishing liquid. 
     
     
         29 . A production method for a polishing liquid, wherein abrasive grains obtained by the production method according to  claim 16 , an additive and water are mixed to obtain a polishing liquid. 
     
     
         30 . A production method for a slurry, wherein abrasive grains obtained by the production method according to  claim 26  are mixed with water to obtain a slurry. 
     
     
         31 . A production method for polishing liquid, wherein a slurry obtained by the production method according to  claim 30  is mixed with an additive to obtain a polishing liquid. 
     
     
         32 . A production method for a polishing liquid, wherein abrasive grains obtained by the production method according to  claim 26 , an additive and water are mixed to obtain a polishing liquid.