Dry-removable protective coatings

Abstract

Techniques are disclosed for protecting a surface using a dry-removable protective coating that does not require chemical solutions to be removed. In an embodiment, a protective layer is disposed on a surface. The protective layer is composed of one layer that adheres to the surface. The surface is then processed while the protective coating is on the surface. Thereafter, the protective layer is removed from the surface by separating the protective layer away from the surface without the use of chemical solutions.

What is claimed is: 
     
         1 . A protective coating, comprising:
 a base resin comprising a passivation stress buffer material selected from the group consisting of polybenzoxazole (PBO), liquid crystal polymer (LCP), polynorbornenes (PNB), polyphenylene sulfide (PPS), benzocylcobutene (BCB), and polyimide (PI); and   a loosening additive that decreases the adhesive strength of the base resin.   
     
     
         2 . The protective coating of  claim 1 , wherein the loosening additive is a monomeric surfactant. 
     
     
         3 . The protective coating of  claim 2 , wherein the monomeric surfactant is a material selected from the group consisting of fluorosurfactants and siloxanes. 
     
     
         4 . The protective coating of  claim 1 , further comprising an additive selected from the group consisting of an elastomer, a photo pack, and a rigid particle filler. 
     
     
         5 . The protective coating of  claim 1 , wherein the base resin has a tensile strength of at least 20 MPa. 
     
     
         6 . The protective coating of  claim 1 , wherein the protective coating has a pre-cure adhesive strength in the range of 500 mN/20 mm to 9000 mN/20 mm and a target post-cure adhesive strength in the range of 50 mN/20 mm to 400 mN/20 mm when adhered to silicon.