Multilayer thin film device encapsulation using soft and pliable layer first

Abstract

A thin film device. The thin film device may include: an active device region, the active device region comprising a diffusant; and a thin film encapsulant disposed adjacent to the active device region and encapsulating at least a portion of the active device region, the thin film encapsulant comprising: a first layer, the first layer disposed immediately adjacent the active device region and comprising a soft and pliable material; and a second layer disposed on the first layer, the second layer comprising a rigid dielectric material or rigid metal material.

What is claimed is: 
     
         1 . A thin film battery, comprising:
 a selective expansion region; and   a polymer layer disposed adjacent to the active device region and encapsulating the selective expansion region, the polymer layer comprising a plurality of polymer sub-layers, wherein a first polymer sub-layer of the plurality of polymer sub-layers comprises a soft and pliable layer having a first hardness, and wherein a second polymer sub-layer of the plurality of polymer sub-layers has a second hardness, the second hardness being greater than the first hardness.   
     
     
         2 . The thin film battery of  claim 1 , wherein the polymer layer comprises a three-layer polymer layer stack comprising:
 a first outer polymer sub-layer, the first outer polymer sub-layer being disposed on the selective expansion region, wherein the first outer polymer sub-layer comprises the second hardness;   an inner polymer sub-layer, the inner polymer sub-layer being disposed on the first outer polymer sub-layer and comprising the first hardness and exhibiting soft and pliable properties; and   a second outer polymer sub-layer, the second outer polymer sub-layer being disposed on the inner polymer sub-layer, the second outer polymer sub-layer being harder than the inner polymer sub-layer.   
     
     
         3 . The thin film battery of  claim 1 , wherein the first polymer sub-layer comprises one of: silicone, Parylene-C, and KMPR. 
     
     
         4 . The thin film battery of  claim 3 , wherein the second polymer sub-layer comprises one of: Parylene-C, KMPR, and polyimide. 
     
     
         5 . The thin film battery of  claim 2 , wherein the inner polymer sub-layer comprises one of:
 silicone, Parylene-C, and KMPR, and wherein the first outer polymer sub-layer and the second outer polymer sub-layer comprise one of: Parylene-C, KMPR, and polyimide.   
     
     
         6 . The thin film battery of  claim 1 , wherein the selective expansion region comprises an anode, the thin film device further comprising:
 a lithium-containing cathode; and   a solid state electrolyte, the solid state electrolyte being disposed between the lithium-containing cathode and the anode.   
     
     
         7 . The thin film battery of  claim 1 , wherein the polymer layer is a first polymer layer, the thin film battery further comprising:
 a first rigid layer, disposed on the first polymer layer;   a second polymer layer, disposed on the first rigid layer; and   a second rigid layer, disposed on the second polymer layer.   
     
     
         8 . The thin film battery of  claim 7 , wherein the first rigid layer comprises a rigid metal layer or a rigid dielectric layer, and wherein the second rigid layer comprises a rigid metal layer or a rigid dielectric layer. 
     
     
         9 . The thin film battery of  claim 7 , wherein a thickness of the first polymer layer is between 10 μm and 50 μm. 
     
     
         10 . The thin film battery of  claim 9 , wherein a thickness of the first rigid layer is 5 μm or less, and wherein a thickness of the second rigid layer is 5 μm or less. 
     
     
         11 . The thin film battery of  claim 9 , wherein a thickness of the second polymer layer is 20 μm or less. 
     
     
         12 . The thin film battery of  claim 2 , wherein the polymer layer is a first polymer layer, the thin film battery further comprising:
 a first rigid layer, disposed on the first polymer layer;   a second polymer layer, disposed on the first rigid layer; and   a second rigid layer, disposed on the second polymer layer.   
     
     
         13 . The thin film battery of  claim 12 , wherein the first rigid layer comprises a rigid metal layer or a rigid dielectric layer, and wherein the second rigid layer comprises a rigid metal layer or a rigid dielectric layer. 
     
     
         14 . The thin film battery of  claim 12 , wherein a thickness of the first polymer layer is between 10 μm and 50 μm. 
     
     
         15 . The thin film battery of  claim 14 , wherein a thickness of the first rigid layer is 5 μm or less, and wherein a thickness of the second rigid layer is 5 μm or less. 
     
     
         16 . The thin film battery of  claim 14 , wherein a thickness of the second polymer layer is 20 μm or less. 
     
     
         17 . A thin film battery, comprising:
 a lithium-containing cathode;   a solid state electrolyte, disposed on the cathode;   an anode disposed on the solid state electrolyte; and   
       a thin film encapsulant disposed adjacent to the anode, the thin film encapsulant comprising:
 a first polymer sub-layer, disposed on the anode, the first polymer sub-layer having a first hardness; 
 a second polymer sub-layer, disposed on the first polymer sub-layer, the second polymer sub-layer having a second hardness, the second hardness being different from the first hardness; 
 a first rigid layer, disposed on the first polymer layer; 
 a second polymer layer disposed on the first rigid layer; and 
 a second rigid layer disposed on the second polymer layer. 
 
     
     
         18 . The thin film battery of  claim 17 , wherein the polymer layer comprises a three-layer polymer layer stack comprising the first polymer layer:
 a first outer polymer sub-layer, the first outer polymer sub-layer being disposed on the anode, wherein the first outer polymer sub-layer comprises the second hardness;   an inner polymer sub-layer, the inner polymer sub-layer being disposed on the first outer polymer sub-layer and comprising the first hardness; and   a second outer polymer sub-layer, the second outer polymer sub-layer being disposed on the inner polymer sub-layer, the second outer polymer sub-layer being harder than the inner polymer sub-layer.