Substrate holding apparatus, exposure apparatus, and device fabricating method

Abstract

An exposure apparatus exposes a substrate to light passing through liquid, and includes a stage that holds the substrate. The stage includes a substrate holder including a support member that supports a rear surface of the substrate and a first circumferential wall surrounding the support member. A second circumferential wall surrounds the substrate holder and forms a first groove between the second circumferential wall and the substrate holder, and a second groove on an outer side thereof. A plate member surrounds the substrate on the support member, and a recovery passage recovers liquid flowing from a liquid supply system to a gap between the plate member and the substrate. The second circumferential wall is under the gap so that part of an upper surface of the second circumferential wall faces the substrate rear surface and another part of the upper surface faces a rear surface of the plate member.

1 . An exposure apparatus that exposes a substrate to light passing through liquid, the apparatus comprising:
 a stage that holds the substrate; and   a liquid supply system that supplies the liquid onto the stage holding the substrate,   wherein the stage comprises:   a substrate holder that holds the substrate, the substrate holder including a support member that supports a rear surface of the substrate and a first circumferential wall that surrounds the support member and faces the rear surface of the substrate on the support member;   a second circumferential wall that surrounds the substrate holder and forms a first groove and a second groove, the first groove being located between the second circumferential wall and the substrate holder, the second groove being located on an outer side of the second circumferential wall;   a plate member that surrounds the substrate on the support member; and   a recovery passage that recovers liquid flowing from the liquid supply system to a gap between the plate member and the substrate on the support member, the recovery passage having recovery ports located below the gap, and   wherein the second circumferential wall is arranged under the gap so that a part of an upper surface of the second circumferential wall faces the rear surface of the substrate on the support member and another part of the upper surface of the second circumferential wall faces a rear surface of the plate member.