Inventor · disambiguated record
Makoto Shibuta
Also filed as: SHIBUTA MAKOTO
13 granted patents·6 pending applications·93 citations·filing 2005–2018
90Inventor score
Top patents by PatentIndex Score
19 records- 0196US7456929B2Exposure apparatus and device manufacturing methodNIKON CORP·Filed 2005·Granted Nov 25, 2008·61 cites·23 claims
- 0285US8368870B2Exposure apparatus and device manufacturing methodNIKON CORP·Filed 2005·Granted Feb 5, 2013·6 cites·45 claims
- 0383US8089615B2Substrate holding apparatus, exposure apparatus, exposing method, and device fabricating methodMIZUTANI TAKEYUKI·Filed 2008·Granted Jan 3, 2012·11 cites·32 claims
- 0481US8102512B2Substrate holding device, exposure apparatus, and device manufacturing methodSHIBUTA MAKOTO·Filed 2005·Granted Jan 24, 2012·6 cites·11 claims
- 0578US9224632B2Substrate holding apparatus, exposure apparatus, and device fabricating methodSHIBUTA MAKOTO·Filed 2005·Granted Dec 29, 2015·5 cites·28 claims
- 0674US9470984B2Exposure apparatusNIKON CORP·Filed 2013·Granted Oct 18, 2016·1 cites·34 claims
- 0771US9690206B2Substrate holding apparatus, exposure apparatus, and device fabricating methodNIKON CORP·Filed 2015·Granted Jun 27, 2017·1 cites·13 claims
- 0867US9341959B2Substrate holding device, exposure apparatus, and device manufacturing methodSHIBUTA MAKOTO·Filed 2011·Granted May 17, 2016·1 cites·17 claims
- 0965US8384874B2Immersion exposure apparatus and device manufacturing method to detect if liquid on base memberNIKON CORP·Filed 2005·Granted Feb 26, 2013·1 cites·40 claims
- 1061US2018136571A1Exposure apparatusNIKON CORP·Filed 2018·Application pending·0 cites
- 1160US9904182B2Exposure apparatusNIKON CORP·Filed 2016·Granted Feb 27, 2018·0 cites·42 claims
- 1260US2018292759A1Substrate holding device, exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2018·Application pending·0 cites
- 1358US9964860B2Substrate holding apparatus, exposure apparatus, and device fabricating methodNIKON CORP·Filed 2017·Granted May 8, 2018·0 cites·19 claims
- 1458US9250537B2Immersion exposure apparatus and method with detection of liquid on members of the apparatusNIKON CORP·Filed 2013·Granted Feb 2, 2016·0 cites·20 claims
- 1558US2018246417A1Substrate holding apparatus, exposure apparatus, and device fabricating methodNIKON CORP·Filed 2018·Application pending·0 cites
- 1655US8456609B2Exposure apparatus and device manufacturing methodSHIBUTA MAKOTO·Filed 2008·Granted Jun 4, 2013·0 cites·39 claims
- 1755US2016231653A1Substrate holding device, exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2016·Application pending·0 cites
- 1853US2016109810A1Immersion exposure apparatus and method with detection of liquid on members of the apparatusNIKON CORP·Filed 2015·Application pending·0 cites
- 1946US2009109413A1Maintenance method, exposure method and apparatus, and device manufacturing methodNIKON CORP·Filed 2008·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →