Catadioptric projection objective comprising deflection mirrors and projection exposure method

Abstract

A catadioptric projection objective has a multiplicity of lenses and at least one concave mirror, and also two deflection mirrors in order to separate a partial beam path running from the object field to the concave mirror from the partial beam path running from the concave mirror to the image field. The deflection mirrors are tilted relative to the optical axis of the projection objective about tilting axes running parallel to a first direction (x-direction). The first deflection mirror is arranged in optical proximity to a first field plane and the second deflection mirror is arranged in optical proximity to a second field plane, which is optically conjugate with respect to the first field plane. A displacement device for the synchronous displacement of the deflection mirrors is provided. The deflection mirrors have different local distributions of their reflection properties in first and second reflection regions, respectively.

1 . Catadioptric projection objective for imaging a pattern of a mask arranged in an effective object field of an object surface (OS) of the projection objective into an effective image field arranged in the image surface of the projection objective, comprising:
 a multiplicity of lenses and at least one concave mirror (CM);   a first deflection mirror (FM 1 ) for deflecting the radiation coming from the object surface (OS) to the concave mirror and a second deflection mirror (FM 2 ) for deflecting the radiation coming from the concave mirror in the direction of the image surface (IS),   wherein:   the deflection mirrors are tilted relative to an optical axis (OA) of the projection objective about tilting axes running perpendicularly to the optical axis and parallel to a first direction;   the first deflection mirror is arranged in optical proximity to a first field plane and the second deflection mirror is arranged in optical proximity to a second field plane, which is optically conjugate with respect to the first field plane; and   an optical imaging system arranged between the first field plane and the second field plane has in the first direction an imaging scale β x  from the range −0.8>β x >−1.2,   characterized by   a displacement device (DISX), for the synchronous displacement of the first deflection mirror (FM 1 ) and of the second deflection mirror (FM 2 ) parallel to the first direction between a first position and a second position, which is offset by a displacement distance (DIS) relative to the first position,   wherein a projection radiation beam running between the effective object field and the effective image field is reflected in first reflection regions in the first position of the deflection mirrors and in second reflection regions in the second position of the deflection mirrors, said second reflection regions being laterally offset by the displacement distance (DIS) parallel to the first direction relative to the first reflection regions, and wherein the deflection mirrors have different local distributions of reflection properties in the first and the second reflection regions.