Solid material container and solid material product with solid material filled in solid material container

Abstract

A solid material container for supplying solid materials housed inside by evaporating the solid materials, and includes a carrier gas introduction line, a first filling section that is filled with the solid material, a second filling section that is located in at least a part of an outer periphery of the first filling section, and is filled with the solid material, at least one tray-shaped third filling section that is disposed on the ceiling side of an interior of the solid material container, and a solid material lead-out line.

1 . A solid material container for supplying a solid material housed inside by evaporating or sublimating the solid material, the solid material container comprising:
 a carrier gas introduction line configured and adapted to introduce a carrier gas to inside of the solid material container;   a first filling section that is disposed in the solid material container and is filled with the solid material;   a second filling section that is located in at least a part of an outer periphery of the first filling section, and is filled with the solid material;   at least one third filling section that is disposed on a ceiling side of an interior of the solid material container; and   a solid material vapor lead-out line configured and adapted to conduct the solid material vapor that is entrained by the carrier gas from the solid material container,   wherein a carrier gas outlet of the carrier gas introduction line is provided in the first filling section and configured and adapted to introduce the carrier gas into the first filling section,   and wherein an inlet of the solid material vapor lead-out line is provided in the third filling section and configured and adapted to conduct the solid material vapor that is entrained by the carrier gas from the solid material container, and   wherein the solid material container is configured and adapted so that the carrier gas flows from the first filling section to the second filling section, and then to the third filling section.   
     
     
         2 . The solid material container according to  claim 1 , wherein
 the solid material container comprises the carrier gas within the first, second and third sections,   in the first filling section, a concentration of the solid material vapor in the carrier gas is at a first concentration,   in the second filling section, the concentration of the solid material vapor in the carrier gas is at a second concentration higher than the first concentration, and   in the third filling section, the concentration of the solid material vapor in the carrier gas is at a third concentration which is equal to or greater than the second concentration.   
     
     
         3 . The solid material container according to  claim 1 , wherein the second filling section is disposed in a ring shape in an outside section of the first filling section. 
     
     
         4 . The solid material container according to  claim 1 , wherein a surface of a part or all parts of an inside of the solid material container has a black surface. 
     
     
         5 . The solid material container according to  claim 1 , wherein at least a part of a side wall of the third filling section is in contact with an inner wall of the solid material container. 
     
     
         6 . The solid material container according to  claim 1 , wherein a side wall of the third filling section has an opening hole portion that is configured and adapted so that the carrier gas entraining the solid material vapor is able to flow through the third filling section. 
     
     
         7 . The solid material container according to  claim 1 , wherein the third filling section has an opening hole projected portion that is configured and adapted so that the carrier gas entraining the solid material vapor is able to flow through the third filling section. 
     
     
         8 . The solid material container according to  claim 1 , wherein the third filling section further comprises a heat transfer portion that extends radially or concentrically around a central portion of the solid material container. 
     
     
         9 . The solid material container according to  claim 1 , wherein the carrier gas outlet of the carrier gas introduction line has two or more exhaust holes. 
     
     
         10 . The solid material container according to  claim 1 , further comprising:
 a partition between the first filling section and the second filling section,   wherein the second filling section has one or two or more divided portions in which the filled solid material is divided into two or more compartments by a sub-partition, and   the sub-partition has one or more carrier gas flow openings configured and adapted so that the carrier gas is able to flows into the two or more divided portions.   
     
     
         11 . The solid material container according to  claim 1 , wherein the second filling section further has two or more upflow layers configured and adapted to flow the carrier gas to an upward direction from a bottom, and a downflow layer configured and adapted to flows the carrier gas to a downward direction from a top, and a number of the downflow layers of the second filling section is smaller by one than a number of the upflow layers. 
     
     
         12 . The solid material container according to  claim 1 , in which a the solid material is filled in the solid material container and wherein a weight of the solid material that is filled in the first filling section is 20% to 70%, inclusive, of a total weight of the solid material which is filled in the solid material container,
 a weight of the solid material that is filled in the second filling section is 20% to 70%, inclusive, of the total weight of the solid material which is filled in the solid material container, and   a weight of the solid material which is filled in the third filling section is 1% to 60%, inclusive, of the total weight of the solid material which is filled in the solid material container.   
     
     
         13 . The solid material container according to  claim 1 , further comprising a heater for heating the solid material container. 
     
     
         14 . The solid material container of  claim 1  in which the solid material is filled in the solid material container.