Transfer Position for Workpieces and Replaceable Parts in a Vacuum Processing Apparatus

Abstract

Systems and methods for processing workpieces, such as semiconductor workpieces are provided. One example embodiment is directed to a processing system for processing a plurality of workpieces. The processing system can include a loadlock chamber, a transfer chamber, and at least two processing chamber having two or more processing stations. The processing system further includes a storage chamber for storing replaceable parts. The transfer chamber includes a workpiece handling robot. The workpiece handling robot can be configured to transfer a plurality of replaceable parts from the processing stations to the storage chamber.

1 - 20 . (canceled) 
     
     
         21 . A system for processing workpieces, comprising:
 a front end portion configured to be maintained at atmospheric pressure; a loadlock chamber disposed between the front end portion and a vacuum portion; one or more process chamber disposed in the vacuum portion, each process chamber comprising two or more processing stations;   at least one transfer chamber disposed in the vacuum portion; and   a storage chamber configured to store one or more replaceable parts coupled to the at least one transfer chamber;   one or more workpiece handling robots disposed in the at least one transfer chamber, the one or more workpiece handling robots configured to move the one or more replaceable parts between the storage chamber and the one or more process chambers, wherein the one or more workpiece handling robots comprises an end effector configured to support a replaceable part;   wherein the one or more process chambers comprise a first process chamber and a second process chamber disposed on opposing sides of the transfer chamber, the one or more process chambers further comprise a third process chamber disposed in a linear arrangement with the first process chamber and a fourth process chamber disposed in a linear arrangement with the second process chamber such that the third process chamber and the fourth process chamber are disposed on opposing sides of the transfer chamber, wherein each of the first process chamber, second process chamber, third process chamber, and fourth process chamber comprise at least two process stations, wherein the transfer chamber comprises a transfer position having a workpiece column configured to support one or more workpieces and one or more replaceable parts in a stacked arrangement   wherein the one or more workpieces have a different diameter relative to a diameter of the one or more replaceable parts.   
     
     
         22 . The system of  claim 21 , wherein the stacked arrangement includes a plurality of shelves configured to house both workpieces and replaceable parts, the replaceable parts having a larger diameter than the workpieces. 
     
     
         23 . The system of  claim 21 , wherein the replaceable part includes a focus ring having a larger diameter than the workpiece. 
     
     
         24 . The system of  claim 21 , wherein the storage chamber includes a plurality of shelves configured to house both used and new replaceable parts. 
     
     
         25 . The system of  claim 24 , wherein the plurality of shelves are coupled to an elevator such that the elevator is configured to move replaceable parts up and down within the storage chamber. 
     
     
         26 . The system of  claim 21 , wherein the storage chamber is a vacuum capable storage chamber that includes one or more access doors configured to allow the workpiece robot to access replaceable parts in the storage chamber and one or more access doors configured to allow for replacement of new or used replaceable parts from the atmospheric surrounding environment,