Inventor · disambiguated record
Michael X. Yang
Also filed as: YANG MICHAEL · YANG MICHAEL W · YANG MICHAEL X · YANG MICHAEL XIAOXUAN
62 granted patents·23 pending applications·300 citations·filing 1989–2024
98Inventor score
Files withMATTSON TECH INC53BEIJING E TOWN SEMICONDUCTOR TECH CO LTD11YANG MICHAEL XIAOXUAN6SAKURA FINETEK USA INC4OCROLUS LLC2
Top patents by PatentIndex Score
85 records- 0197US11495437B2Surface pretreatment process to improve quality of oxide films produced by remote plasmaMATTSON TECH INC·Filed 2020·Granted Nov 8, 2022·4 cites·20 claims
- 0297US10269574B1Surface treatment of carbon containing films using organic radicalsMATTSON TECH INC·Filed 2018·Granted Apr 23, 2019·12 cites·25 claims
- 0396US11043393B2Ozone treatment for selective silicon nitride etch over siliconMATTSON TECH INC·Filed 2020·Granted Jun 22, 2021·5 cites·20 claims
- 0494US11276560B2Spacer etching processMATTSON TECH INC·Filed 2020·Granted Mar 15, 2022·4 cites·17 claims
- 0594US10804109B2Surface treatment of silicon and carbon containing films by remote plasma with organic precursorsMATTSON TECH INC·Filed 2018·Granted Oct 13, 2020·6 cites·27 claims
- 0694US8734442B2Ablation catheter with thermally mediated catheter body for mitigating blood coagulation and creating larger lesionST JUDE MEDICAL ATRIAL FIBRILL·Filed 2013·Granted May 27, 2014·99 cites·20 claims
- 0793US11062910B2Surface treatment of silicon or silicon germanium surfaces using organic radicalsMATTSON TECH INC·Filed 2019·Granted Jul 13, 2021·4 cites·18 claims
- 0893US10403492B1Integration of materials removal and surface treatment in semiconductor device fabricationMATTSON TECH INC·Filed 2018·Granted Sep 3, 2019·8 cites·19 claims
- 0992US11482434B2Systems and methods for workpiece processingMATTSON TECH INC·Filed 2021·Granted Oct 25, 2022·2 cites·20 claims
- 1092US10354883B2Surface treatment of silicon or silicon germanium surfaces using organic radicalsMATTSON TECH INC·Filed 2018·Granted Jul 16, 2019·4 cites·24 claims
- 1191US11955388B2Transmission-based temperature measurement of a workpiece in a thermal processing systemBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2023·Granted Apr 9, 2024·1 cites·18 claims
- 1290US11610824B2Transmission-based temperature measurement of a workpiece in a thermal processing systemMATTSON TECH INC·Filed 2021·Granted Mar 21, 2023·2 cites·20 claims
- 1389US11387111B2Processing of workpieces with reactive species generated using alkyl halideMATTSON TECH INC·Filed 2019·Granted Jul 12, 2022·4 cites·18 claims
- 1489US11289323B2Processing of semiconductors using vaporized solventsMATTSON TECH INC·Filed 2018·Granted Mar 29, 2022·4 cites·8 claims
- 1588US11164725B2Generation of hydrogen reactive species for processing of workpiecesMATTSON TECH INC·Filed 2019·Granted Nov 2, 2021·3 cites·13 claims
- 1688US10950428B1Method for processing a workpieceMATTSON TECH INC·Filed 2019·Granted Mar 16, 2021·4 cites·18 claims
- 1788US8449537B2Ablation catheter with thermally mediated catheter body for mitigating blood coagulation and creating larger lesionCAO HONG·Filed 2006·Granted May 28, 2013·57 cites·16 claims
- 1886US7168694B2Multi-axis workpiece chuckSAKURA FINETEK USA INC·Filed 2004·Granted Jan 30, 2007·26 cites·26 claims
- 1985US11087409B1Systems and methods for generating accurate transaction data and manipulationOCROLUS LLC·Filed 2017·Granted Aug 10, 2021·20 cites·20 claims
- 2084US11387115B2Silicon mandrel etch after native oxide punch-throughMATTSON TECH INC·Filed 2019·Granted Jul 12, 2022·4 cites·10 claims
- 2182US11164742B2Selective deposition using methylation treatmentMATTSON TECH INC·Filed 2020·Granted Nov 2, 2021·1 cites·19 claims
- 2282US10580672B2Systems and methods for workpiece processingMATTSON TECH INC·Filed 2017·Granted Mar 3, 2020·3 cites·12 claims
- 2382US9190294B2Methods and apparatus for separating a substrateYANG MICHAEL XIAOXUAN·Filed 2012·Granted Nov 17, 2015·4 cites·21 claims
- 2481US12400916B2Transmission-based temperature measurement of a workpiece in a thermal processing systemBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2024·Granted Aug 26, 2025·0 cites·18 claims
- 2581US10573532B2Method for processing a workpiece using a multi-cycle thermal treatment processMATTSON TECH INC·Filed 2018·Granted Feb 25, 2020·2 cites·14 claims
- 2679US2025093852A1Control System For Adaptive Control Of A Thermal Processing SystemBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2024·Application pending·0 cites
- 2778US12174616B2Control system for adaptive control of a thermal processing systemBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2023·Granted Dec 24, 2024·0 cites·6 claims
- 2877US10299820B2Methods and systems for disrupting calcified walls of biological conduits and calcified lesions thereinCARDIVASCULAR SYSTEMS·Filed 2016·Granted May 28, 2019·5 cites·4 claims
- 2977US7530557B2Multi-axis workpiece chuckSAKURA FINETEK USA INC·Filed 2007·Granted May 12, 2009·4 cites·10 claims
- 3075US12119216B2Arc lamp with forming gas for thermal processing systemsBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2023·Granted Oct 15, 2024·0 cites·24 claims
- 3175US2022090221A1Thermal Processing of Closed Shape WorkpiecesMATTSON TECH INC·Filed 2021·Application pending·0 cites
- 3275US2024387205A1Support Plate for Localized Heating in Thermal Processing SystemsMATTSON TECH INC·Filed 2024·Application pending·0 cites
- 3375US2023091035A1Transfer Position for Workpieces and Replaceable Parts in a Vacuum Processing ApparatusBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2022·Application pending·0 cites
- 3474US10964528B2Integration of materials removal and surface treatment in semiconductor device fabricationMATTSON TECH INC·Filed 2019·Granted Mar 30, 2021·1 cites·15 claims
- 3573US12080568B2Support plate for localized heating in thermal processing systemsMATTSON TECH INC·Filed 2022·Granted Sep 3, 2024·0 cites·3 claims
- 3671US11193178B2Thermal processing of closed shape workpiecesMATTSON TECH INC·Filed 2018·Granted Dec 7, 2021·0 cites·8 claims
- 3770US12183558B2Workpiece processing apparatus with thermal processing systemsBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2023·Granted Dec 31, 2024·0 cites·14 claims
- 3870US11791166B2Selective etch process using hydrofluoric acid and ozone gasesMATTSON TECH INC·Filed 2021·Granted Oct 17, 2023·0 cites·6 claims
- 3969US12442078B2Workpiece processing apparatus with gas showerhead assemblyMATTSON TECH INC·Filed 2021·Granted Oct 14, 2025·0 cites·14 claims
- 4069US11923215B2Systems and methods for workpiece processingBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2022·Granted Mar 5, 2024·0 cites·14 claims
- 4168US12014920B2Apparatus for hydrogen assisted atmospheric radical oxidationMATTSON TECH INC·Filed 2022·Granted Jun 18, 2024·0 cites·15 claims
- 4268US11721539B2Arc lamp with forming gas for thermal processing systemsMATTSON TECH INC·Filed 2021·Granted Aug 8, 2023·0 cites·14 claims
- 4368US11644817B2Control system for adaptive control of a thermal processing systemMATTSON TECH INC·Filed 2020·Granted May 9, 2023·0 cites·18 claims
- 4466US10910228B2Surface treatment of carbon containing films using organic radicalsMATTSON TECH INC·Filed 2019·Granted Feb 2, 2021·0 cites·17 claims
- 4566US2022223405A1Processing of Semiconductors Using Vaporized SolventsBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2022·Application pending·0 cites
- 4665US11183397B2Selective etch process using hydrofluoric acid and ozone gasesMATTSON TECH INC·Filed 2020·Granted Nov 23, 2021·0 cites·8 claims
- 4765US9196503B2Methods for fabricating devices on semiconductor substratesYANG MICHAEL XIAOXUAN·Filed 2012·Granted Nov 24, 2015·1 cites·18 claims
- 4865US2022059321A1Generation of Hydrogen Reactive Species For Processing of WorkpiecesMATTSON TECH INC·Filed 2021·Application pending·0 cites
- 4962US2006237325A1Cu ecp planarization by insertion of polymer treatment step between gap fill and bulk fill stepsYANG MICHAEL X·Filed 2006·Application pending·0 cites
- 5062US2023031492A1Automated staining system and reaction chamberSAKURA FINETEK USA INC·Filed 2020·Application pending·0 cites
Showing the top 50 of 85 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →