US2023125270A1PendingUtilityA1
Radiation sensitive composition
Est. expiryJun 11, 2035(~8.9 yrs left)· nominal 20-yr term from priority
H10P 50/695H10P 50/692C08G 77/06G03F 7/0757G03F 7/075C08G 77/50C07F 7/1804G03F 7/038G03F 7/36G03F 7/168G03F 7/38C07F 7/18G03F 7/0755C08G 77/14G03F 7/322C08G 77/18G03F 7/30G03F 7/2002G03F 7/0045G03F 7/162C07F 7/0838C08G 77/80C09D 183/06H01L 21/3086H01L 21/3081C07F 7/188
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Claims
Abstract
A compound of Formula (5-1) or Formula (5-3):where R17 and R21 are each an ethyl group; R22 and R23 are each a methyl group; and R16 and R20 are each a methoxy group.
Claims
exact text as granted — not AI-modified1 . A compound of Formula (5-1) or Formula (5-3):
wherein R 17 and R 21 are each an ethyl group; R 22 and R 23 are each a methyl group; and R 16 and R 20 are each a methoxy group.
2 . The compound of claim 1 , wherein the compound is a compound of Formula (5-1).
3 . The compound of claim 1 , wherein the compound is a compound of Formula (5-3).Join the waitlist — get patent alerts
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