Process for preparing organotin compounds

Abstract

Provided is a facile methodology for preparing certain organotin compounds having alkyl and alkylamino or alkyl and alkoxy substituents. The process provides the organotin compounds in a highly pure form which are particularly useful as precursors in the deposition of high-purity tin oxide films in, for example, extreme ultraviolet light (EUV) lithography techniques used in the manufacture of certain microelectronic devices.

What is claimed is: 
     
         1 - 20 . (canceled) 
     
     
         21 . A process for preparing a compound of the Formula (I):
                       wherein each R is independently chosen from C 1 -C 5  alkyl groups, each R 1  is independently chosen from C 1 -C 5  alkyl groups, and R 2  is chosen from hydrogen, a substituted or unsubstituted C 1 -C 5  alkyl group, and a C 3 -C 5  cycloalkyl group, wherein the process comprises:   contacting a compound of the Formula (A)                         with a compound of the Formula L-R 2 , wherein L is leaving group, and M is chosen from sodium, lithium, or potassium.   
     
     
         22 . The process of  claim 21 , wherein L is a halide or a substituted or unsubstituted aromatic or alkyl sulfonate. 
     
     
         23 . The process of  claim 21 , wherein each R and each R 1  is a methyl group. 
     
     
         24 . The process of  claim 21 , wherein each R and each R 1  is a methyl group and R 2  is an ethyl group. 
     
     
         25 . The process of  claim 21 , wherein each R and each R 1  is a methyl group and R 2  is an isopropyl group. 
     
     
         26 . The process of  claim 21 , wherein R 2  is a cycloalkyl group. 
     
     
         27 . The process of  claim 21 , wherein R 2  is a substituted alkyl group. 
     
     
         28 . The process of  claim 21 , wherein R 2  comprises a vinyl group. 
     
     
         29 . The process of  claim 21 , wherein R 2  comprises an acetylide group. 
     
     
         30 . The process of  claim 21 , wherein the compound of Formula A is prepared by reaction of a dihalostannane with a compound of the Formula (B):
                       .   
     
     
         31 . The process of  claim 30 , wherein the dihalostannane is SnCl 2 . 
     
     
         32 . A compound of Formula (II):
                       wherein each R 3  is independently chosen from C 1 -C 5  alkyl groups, a phenyl group, and substituted phenyl groups, and R 2  is chosen from hydrogen or substituted C 1 -C 5  alkyl groups.   
     
     
         33 . The compound of  claim 32 , wherein R 2  is a halogen substituted C 1 -C 5  alkyl group. 
     
     
         34 . The compound of  claim 32 , wherein R 2  is a fluorine substituted C 1 -C 5  alkyl group. 
     
     
         35 . A process for preparing a compound of Formula (I):
                       wherein each R is independently chosen from C 1 -C 5  alkyl groups, each R 1  is independently chosen from C 1 -C 5  alkyl groups, and R 2  is chosen from hydrogen or substituted C 1 -C 5  alkyl groups, wherein the process comprises:   contacting a compound of Formula (II):                         wherein each R 3  is independently chosen from straight or branched chain C 1 -C 8  alkyl groups a phenyl group, and substituted phenyl groups,   with a compound of Formula (R 4 ) 3 Si-N(R)(R 1 ), wherein R 4  is chosen from C 1 -C 3  alkyl groups.   
     
     
         36 . The process of  claim 35 , wherein R 3  is a substituted phenyl group selected from phenyl groups substituted one or more times with groups chosen from C 1 -C 4  alkyl, C 1 -C 4  alkoxy, C 1 -C 4  alkylsulfonyl, hydroxy, cyano, nitro, halo, trihalomethyl, phenyl, phenoxy, and C 3 -C 6  cycloalkyl. 
     
     
         37 . The process of  claim 36 , wherein substituted phenyl group is a 2,6-di-t-butylphen-1-yl group or a 2,4,6-trimethylphenyl group. 
     
     
         38 . The process of  claim 35 , wherein the compound of the formula (R 4 ) 3 SiN(R)(R 1 ) is (CH 3 ) 3 Si—N(CH 3 ) 2 . 
     
     
         39 . The process of  claim 35 , wherein the compound of Formula (II) is prepared by reacting a diahalostannane with a compound of Formula M-OR 3 , wherein M is chosen from sodium, lithium, or potassium to provide a compound of Formula (C):
                       wherein n is greater than or equal to 1.   
     
     
         40 . The process of  claim 39 , wherein the compound of Formula (C) is further reacted with a compound of Formula X-R 2  to provide the compound of Formula (II).