System and method for generating and analyzing roughness measurements

Abstract

In one embodiment, a method for detecting edge positions in a pattern structure is disclosed. The method includes detecting the edge positions of features within the pattern structure of an image without filtering the image, wherein the detecting is performed by: applying a model to a single linescan, adjusting, based on the single linescan, one or more parameters of the model, obtaining, using the one or more adjusted parameters, a best fit of the model to the single linescan.

What is claimed is: 
     
         1 . A method for detecting edge positions in a pattern structure, the method comprising:
 detecting the edge positions of features within the pattern structure of an image without filtering the image, wherein the detecting is performed by:
 applying a model to a single linescan, 
 adjusting, based on the single linescan, one or more parameters of the model, 
 obtaining, using the one or more adjusted parameters, a best fit of the model to the single linescan. 
   
     
     
         2 . The method of  claim 1 , further comprising detecting, using the best fit of the model to the single linescan, the edge positions of the features within the pattern structure of the image. 
     
     
         3 . The method of  claim 1 , further comprising:
 prior to detecting the edge positions of the features within the pattern structure of the image:
 calibrating the model to an average linescan obtained by averaging, using linescan information, over an axis of symmetry of the features, 
 wherein the calibrating comprises the adjusting, based on the average linescan, the one or more parameters of the model to obtain a second best fit of the model to the average linescan. 
   
     
     
         4 . The method of  claim 1 , further comprising:
 prior to detecting the edge positions of the features within the pattern structure of the image:
 calibrating the one or more parameters depending on materials of a sample, properties of an imaging device, and geometry of the features. 
   
     
     
         5 . The method of  claim 1 , further comprising:
 prior to detecting the edge positions of the features within the pattern structure of the image:
 calibrating the one or more parameters depending on the geometry of the features. 
   
     
     
         6 . The method of  claim 1 , further comprising:
 detecting the edge positions of the features within the pattern structure of the image without postprocessing the image.   
     
     
         7 . The method of  claim 1 , further comprising:
 generating, using an imaging device, the image, wherein the image includes linescan information corresponding to the pattern structure that includes noise.   
     
     
         8 . The method of  claim 1 , further comprising detecting, based on the edge positions, displacement of edges of the features within the pattern structure. 
     
     
         9 . A non-transitory, computer-readable medium storing instructions that, when executed, cause a processor to:
 detect edge positions of features within a pattern structure of an image without filtering the image, wherein the detecting is performed by:
 applying a model to a single linescan, 
 adjusting, based on the single linescan, one or more parameters of the model, 
 obtaining, using the one or more adjusted parameters, a best fit of the model to the single linescan. 
   
     
     
         10 . The computer-readable medium of  claim 9 , wherein the processor is further to detect, using the best fit of the model to the single linescan, the edge positions of the features within the pattern structure of the image. 
     
     
         11 . The computer-readable medium of  claim 9 , wherein the processor is further caused to:
 prior to detecting the edge positions of the features within the pattern structure of the image:
 calibrate the model to an average linescan obtained by averaging, using linescan information, over an axis of symmetry of the features, 
 wherein the calibrating comprises adjusting, based on the average linescan, the one or more parameters of the model to obtain a second best fit of the model to the average linescan. 
   
     
     
         12 . The computer-readable medium of  claim 9 , wherein the processor is further caused to:
 prior to detecting the edge positions of the features within the pattern structure of the image:
 calibrate the one or more parameters depending on materials of a sample, properties of an imaging device, and geometry of the features. 
   
     
     
         13 . The computer-readable medium of  claim 9 , wherein the processor is further caused to:
 prior to detecting the edge positions of the features within the pattern structure of the image:
 calibrate the one or more parameters depending on the geometry of the features. 
   
     
     
         14 . The computer-readable medium of  claim 9 , wherein the processor is further caused to:
 detect the edge positions of the features within the pattern structure of the image without postprocessing the image.   
     
     
         15 . The computer-readable medium of  claim 9 , wherein the processor is further caused to:
 generate, using an imaging device, the image, wherein the image includes linescan information corresponding to the pattern structure that includes noise.   
     
     
         16 . A system comprising:
 a memory storing instructions; and   a processor communicatively coupled to the memory, the processor executes the instructions to:
 detect edge positions of features within a pattern structure of an image without filtering the image, wherein the detecting is performed by:
 applying a model to a single linescan, 
 adjusting, based on the single linescan, one or more parameters of the model, 
 obtaining, using the one or more adjusted parameters, a best fit of the model to the single linescan. 
 
   
     
     
         17 . The system of  claim 16 , wherein the processor further executes the instructions to detect, using the best fit of the model to the single linescan, the edge positions of the features within the pattern structure of the image. 
     
     
         18 . The system of  claim 16 , wherein the processor is further instructed to:
 prior to detecting the edge positions of the features within the pattern structure of the image:
 calibrate the model to an average linescan obtained by averaging, using linescan information, over an axis of symmetry of the features, 
 wherein the calibrating comprises adjusting, based on the average linescan, the one or more parameters of the model to obtain a best fit of the model to the average linescan. 
   
     
     
         19 . The system of  claim 16 , wherein the processor is further instructed to:
 prior to detecting the edge positions of the features within the pattern structure of the image:
 calibrate the one or more parameters depending on materials of a sample, properties of an imaging device, and geometry of the features. 
   
     
     
         20 . The system of  claim 16 , wherein the processor is further instructed to:
 prior to detecting the edge positions of the features within the pattern structure of the image:
 calibrate the one or more parameters depending on the geometry of the features.