(Disulfonyl diazomethane compounds)

Abstract

Disclosed is a poly(disulfonyl diazomethane) compound as a class of novel compounds represented by the general formula ##STR1## in which the subscript n is 1 to 5, each R is a monovalent hydrocarbon group and Z is a divalent hydrocarbon group. The invention also discloses a chemical-amplification positive-working photoresist composition which comprises the above mentioned poly(disulfonyl diazomethane) compound as the radiation-sensitive acid-generating agent in combination with a film-forming resin capable of being imparted with increased solubility in an aqueous alkaline solution by the interaction with an acid, such as a polyhydroxystyrene resin of which a part of the hydroxyl groups are substituted by acid-dissociable solubility-reducing groups, e.g., tert-butoxycarbonyl groups.

What is claimed is: 
     
       1. A poly(disulfonyl diazomethane) compound represented by the general formula ##STR15## in which the subscript n is a positive integer not exceeding 5, R 1  and R 2  are each, independently from the other, a monovalent cyclic hydrocarbon group having 6 to 15 carbon atoms and Z is a divalent hydrocarbon group. 
     
     
       2. The poly(disulfonyl diazomethane) compound as claimed in claim 1 in which R 1  and R 2  are each, independently from the other, a cycloalkyl group, aryl group or aralkyl group. 
     
     
       3. The poly(disulfonyl diazomethane) compound as claimed in claim 2 in which R 1  and R 2  are each, independently from the other, a cyclohexyl group or a phenyl group. 
     
     
       4. The poly(disulfonyl diazomethane) compound as claimed in claim 1 in which Z is an alkylene group having 1 to 10 carbon atoms. 
     
     
       5. The poly(disulfonyl diazomethane) compound as claimed in claim 1 in which the subscript n is 1. 
     
     
       6. The poly(disulfonyl diazomethane) compound as claimed in claim 1 selected from the group consisting of: 1,3-bis(phenylsulfonyl diazomethylsulfonyl) propane,   1,4-bis(phenylsulfonyl diazomethylsulfonyl) butane,   1,6-bis(phenylsulfonyl diazomethylsulfonyl) hexane,   1,10-bis(phenylsulfonyl diazomethylsulfonyl) decane,   1,2-bis(cyclohexylsulfonyl diazomethylsulfonyl) ethane,   1,3-bis(cyclohexylsulfonyl diazomethylsulfonyl) propane,   1,6-bis(cyclohexylsulfonyl diazomethylsulfonyl) hexane and   1,10-bis(cyclohexylsulfonyl diazomethylsulfonyl) decane.