Process apparatus and method for improving plasma distribution and performance in an inductively coupled plasma

Abstract

A processing system for processing a substrate with a plasma comprises a processing chamber defining a processing space and including a substrate support therein for supporting a substrate in the processing space and a gas inlet for introducing a process gas into said processing space. A plasma source is operable for creating a plasma in the processing space from process gas introduced therein. The plasma source comprises a dielectric window which interfaces with the processing chamber proximate the processing space and an inductive element positioned outside of the chamber and proximate the dielectric window. The inductive element is operable for coupling electrical energy through the dielectric window and into the processing space to create a plasma therein and comprises a variety of alternative designs for providing a dense, uniform plasma.

What is claimed is:  
     
       1. A processing system for processing a substrate with a plasma, the system comprising: 
       a processing chamber defining a processing space and including a substrate support therein for supporting a substrate in the processing space;  
       a gas inlet for introducing a process gas into said processing space;  
       a plasma source operable for creating a plasma in the processing space from process gas introduced therein, the plasma source comprising:  
       a dielectric window having a generally planar surface, the dielectric window interfacing with the processing chamber proximate the processing space;  
       an inductive element positioned outside of the chamber and proximate the dielectric window, the inductive element operable for coupling electrical energy through the dielectric window and into the processing space to create a plasma therein;  
       the inductive element comprising a coil having multiple coil turns disposed successively along the length of the coil, at least one of said coil turns being oriented in a first plane, at least one of said coil turns being oriented in a second plane which is angled from the first plane.  
     
     
       2. The processing system of claim  1  wherein said first plane is oriented generally parallel to the planar surface of the dielectric window. 
     
     
       3. The processing system of claim  1  wherein said inductive element comprises another coil turn oriented in the first plane, the coil turn in the second plane being positioned generally between the coil turns in the first plane. 
     
     
       4. The processing system of claim  1  wherein said inductive element includes multiple coil turns oriented in the first plane. 
     
     
       5. The processing system of claim  1  wherein said inductive element includes multiple coil turns oriented in a plane which is angled from the first plane. 
     
     
       6. The processing system of claim  1  wherein at least one of said coil turns has a semicircular shape. 
     
     
       7. The processing system of claim  1  wherein at least one of said coil turns has a rectangular shape. 
     
     
       8. The processing system of claim  1  further comprising at least one coil turn oriented in a third plane angled between the first and second planes. 
     
     
       9. The processing system of claim  1  wherein said coil turn in the first plane which defines an inner coil end and an outer coil end, the coil turn in the second plane coupled to the outer coil end of the first plane coil turn. 
     
     
       10. The processing system of claim  1  wherein said coil turn in the first plane defines an inner coil end and an outer coil end, the coil turn in the second plane coupled to the inner coil end of the first plane coil turn. 
     
     
       11. The processing system of claim  1  wherein the inductive element further comprises a coil turn having a portion thereof oriented in the first plane and a portion thereof oriented in the second plane. 
     
     
       12. The processing system of claim  1  wherein said second plane is oriented to be generally perpendicular to the first plane. 
     
     
       13. The processing system of claim  1  wherein said processing chamber has a sidewall section formed of a dielectric material, the processing system further comprising: 
       a second inductive element positioned proximate the sidewall section for further coupling electrical energy into the processing space through the sidewall section.  
     
     
       14. The processing system of claim  13  wherein said second inductive element comprises a coil wrapped around the chamber sidewall section. 
     
     
       15. The processing system of claim  13  wherein the first and second inductive elements are each coupled to an electrical energy source for coupling electrical energy into the processing space, the electrical energy sources being independently operable from one another for independently biasing the first and second inductive elements. 
     
     
       16. The processing system of claim  13  further comprising a Faraday shield positioned between said second inductive element and the processing space. 
     
     
       17. The processing system of claim  1  further comprising a Faraday shield positioned between the inductive element and the processing space. 
     
     
       18. The processing system of claim  1  further comprising a mount in the processing chamber configured for holding a target of material. 
     
     
       19. A processing system for processing a substrate with a plasma, the system comprising: 
       a processing chamber defining a processing space and including a substrate support therein for supporting a substrate in the processing space;  
       a gas inlet for introducing a process gas into said processing space;  
       a plasma source operable for creating a plasma in the processing space from process gas introduced therein, the plasma source comprising:  
       a dielectric window having a planar surface, the dielectric window interfacing with the processing chamber proximate the processing space;  
       an inductive element positioned outside of the chamber and proximate the dielectric window, the inductive element operable for coupling electrical energy through the window and into the processing space to create a plasma therein;  
       the inductive element comprising a coil having multiple coil turns, each coil turn comprising a predominant arcuate portion coupled to a linear portion, the predominant arcuate portions of first and second coil turns of the inductive element being oriented in spaced and generally parallel planes to form stacked coil turns, the stacked coil turns oriented generally parallel to said dielectric window planar surface.  
     
     
       20. The processing system of claim  19  wherein the inductive element comprises multiple sets of stacked coil turns. 
     
     
       21. The processing system of claim  19  wherein said processing chamber has a sidewall section formed of a dielectric material, the processing system further comprising: 
       a second inductive element proximate the sidewall section for further coupling electrical energy into the processing space.  
     
     
       22. The processing system of claim  21  wherein said second inductive element comprises a coil wrapped around the chamber sidewall section. 
     
     
       23. The processing system of claim  21  wherein the first and second inductive elements are each coupled to an electrical energy source for coupling electrical energy into the processing space, the electrical energy sources being independently operable from one another for independently biasing the first and second inductive elements. 
     
     
       24. The processing system of claim  21  further comprising a Faraday shield positioned between said second inductive element and the processing space. 
     
     
       25. The processing system of claim  21  further comprising a mount in the processing chamber configured for holding a target of material. 
     
     
       26. The processing system of claim  19  further comprising a Faraday shield positioned between the inductive element and the processing space. 
     
     
       27. The processing system of claim  19  wherein the inductive element further comprises a third coil turn oriented at an angle with respect to said stacked coil turns. 
     
     
       28. A processing system for processing a substrate with a plasma, the system comprising: 
       a processing chamber defining a processing space and including a substrate support therein for supporting a substrate in the processing space;  
       a gas inlet for introducing a process gas into said processing space;  
       a plasma source operable for creating a plasma in the processing space from process gas introduced threrein, the plasma source comprising:  
       a dielectric window having a generally planar surface, the dielectric window interfacing with the processing chamber proximate the processing space;  
       an inductive element positioned outside of the chamber and proximate the dielectric window, the inductive element operable for coupling electrical energy through the dielectric window and into the processing space to create a plasma therein;  
       the inductive element comprising a plurality of repeated conductor segments arranged in a non-coil fashion and positioned in a circular pattern around a center of the inductive element the repeated conductor segments being oriented in planes generally parallel to the planar surface of said dielectric window.  
     
     
       29. The processing system of claim  28  wherein the repeated conductor segments are disposed to extend radially outwardly from a center of the inductive element. 
     
     
       30. The processing system of claim  28  wherein the repeated conductor segments form individual coils, the coils being arranged in a circular pattern around the center of the inductive element. 
     
     
       31. The processing system of claim  28  wherein the chamber comprises an end wall portion and a sidewall portion, the repeated conductor segments including horizontal segments oriented along an end wall portion of the chamber and vertical segments oriented along a sidewall portion of the chamber. 
     
     
       32. The processing system of claim  28  wherein said processing chamber has a sidewall section formed of a dielectric material, the system further comprising: 
       a second inductive element positioned proximate the sidewall section for further coupling electrical energy into the processing space through the sidewall section.  
     
     
       33. The processing system of claim  32  wherein said second inductive element comprises a coil wrapped around the chamber sidewall section. 
     
     
       34. The processing system of claim  32  wherein the first and second inductive elements are each coupled to an electrical energy source for coupling electrical energy into the processing space, the electrical energy sources being independently operable from one another for independently biasing the first and second inductive elements. 
     
     
       35. The processing system of claim  32  further comprising a Faraday shield positioned between said second inductive element and the processing space. 
     
     
       36. The processing system of claim  32  further comprising a target mount in the processing chamber configured for holding a target of material. 
     
     
       37. The processing system of claim  28  further comprising a Faraday shield positioned between the inductive element and the processing space. 
     
     
       38. The processing system of claim  28  wherein the repeated conductor segments of the inductive element form a first layer of the element, the inductive element further comprising an additional layer of repeated conductor segments. 
     
     
       39. The processing system of claim  38  wherein said layers are generally co-extensive. 
     
     
       40. A processing system for processing a substrate with a plasma, the system comprising: 
       a processing chamber defining a processing space and including a substrate support therein for supporting a substrate in the processing space;  
       the processing chamber having a sidewall portion and an endwall portion formed of a dielectric material;  
       a plasma source operable for creating a plasma in the processing space from process gas introduced therein, plasma source comprising:  
       an inductive element positioned outside of the chamber and operable for coupling electrical energy into the processing space to create a plasma therein;  
       the inductive element comprising a coil having multiple coil turns, each of the turns including a segment thereof oriented along said chamber sidewall portion and a segment thereof oriented along said chamber end wall portion for coupling energy simultaneously into the processing space through both the sidewall and end wall portions of the chamber.  
     
     
       41. The processing chamber of claim  40  wherein said inductive element comprises a coil having sets of coil turns, one set of turns being positioned generally along on one side of the chamber and another set of turns being positioned generally along another side of the chamber. 
     
     
       42. The processing system of claim  40  wherein the segment of the coil turn oriented along the chamber sidewall portion includes a section oriented in a first orientation and a section oriented in a second orientation which is angled from the first orientation. 
     
     
       43. The processing system of claim  42  wherein the first orientation is generally perpendicular to the second orientation. 
     
     
       44. The processing system of claim  40  wherein said processing chamber has a sidewall section formed of a dielectric material, the chamber sidewall section being positioned below said sidewall portion and endwall portion, the system further comprising: 
       a second inductive element proximate the sidewall section for further coupling electrical energy into the processing space through the sidewall section.  
     
     
       45. The processing system of claim  44  wherein said second inductive element comprises the form of a coil wrapped around the chamber sidewall section. 
     
     
       46. The processing system of claim  44  wherein the first and second inductive elements are each coupled to an electrical energy source for coupling electrical energy into the processing space, the electrical energy sources being independently operable from one another for independently biasing the first and second inductive elements. 
     
     
       47. The system of claim  44  further comprising a Faraday shield positioned between said second inductive element and the processing space. 
     
     
       48. The system of claim  40  further comprising a Faraday shield positioned between the inductive element and the processing space. 
     
     
       49. The processing system of claim  40  further comprising a mount in the processing chamber configured for holding a target of material. 
     
     
       50. An element for coupling electrical energy into a processing chamber to generate a plasma from a process gas in the chamber, the element comprising: 
       an electrically conductive element comprising a coil having multiple coil turns disposed successively along the length of the coil, at least one of the coil turns being oriented in a first plane, at least one of the coil turns being oriented in a second plane which is angled from said first plane.  
     
     
       51. The element of claim  50  further comprising another coil turn oriented in the first plane, the coil turn in the second plane being positioned generally between the coil turns in the first plane. 
     
     
       52. The element of claim  50  further comprising multiple coil turns oriented in the first plane. 
     
     
       53. The element of claim  50  further comprising multiple coil turns, each turn oriented in a plane generally parallel to said second plane. 
     
     
       54. The element of claim  50  further comprising at least one coil turn oriented in a third plane angled between the first and second planes. 
     
     
       55. The element of claim  50  wherein said second plane is oriented generally perpendicular to the first plane. 
     
     
       56. An element for coupling electrical energy into a processing chamber to generate a plasma from a process gas in the chamber, the element comprising: 
       an electrically conductive element comprising a coil having multiple coil turns, each coil turn comprising a predominantly arcuate portion coupled to a linear portion, the predominantly arcuate portions of first and second coil turns of the element being oriented in spaced and generally parallel planes to form stacked coil turns;  
       the linear portions of the first and second coil turns being substantially co-planar and located in a plane which is generally parallel to the spaced and parallel planes containing the arcuate portions of the coil turns.  
     
     
       57. The element of claim  56  wherein the inductive element comprises multiple sets of stacked coil turns positioned adjacent to each other. 
     
     
       58. An element for coupling electrical energy into a processing chamber through a dielectric window defining a plane to generate a plasma from a process gas in the chamber, the element comprising: 
       an electrically conductive element comprising a plurality of discrete, repeated conductor segments, the discrete, repeated segments arranged in a non-coil fashion and positioned in a circular pattern around a center wherein the circular pattern of the discrete segments leaves the center of the pattern generally open, the element configured to be oriented such that the repeated segments are oriented in planes generally parallel to the plane defined by the dielectric window.  
     
     
       59. The element of claim  58  wherein the repeated conductor segments are disposed to extend radially outwardly from a center of the electrically conductive element. 
     
     
       60. The element of claim  59  wherein the repeated conductor segments form individual coils, the coils being arranged in a circular pattern around the center of the inductive element. 
     
     
       61. The element of claim  59  wherein each of the individual coils are helical in shape and include approximately one and one-half coil turns. 
     
     
       62. The element of claim  58  wherein the repeated conductor segments of the conductive element form a first layer of the element, the conductive element further comprising an additional layer of repeated conductor segments. 
     
     
       63. The element of claim  62  wherein the layers are generally co-extensive. 
     
     
       64. An element for coupling electrical energy into a processing chamber having a sidewall portion and an end wall portion, the element operable to generate a plasma from a process gas in the chamber, the element comprising: 
       an electrically conductive element comprising a coil having multiple coil turns, each of the turns including a segment thereof oriented for being positioned along a chamber sidewall portion and a segment thereof oriented for being simultaneously positioned along a chamber end wall portion for coupling electrical energy into the processing space through both the sidewall and end wall portions of the chamber.  
     
     
       65. The element of claim  64  wherein the conductive element comprises a coil having multiple coil turns arranged in sets of coil turns, at least one set of turns being oriented generally along one side of the chamber and another set of turns being oriented along another side of the chamber. 
     
     
       66. The element of claim  64  wherein the segment of the coil turn oriented along the chamber sidewall portion includes a section oriented in a first orientation and a section oriented in a second orientation which is angled from the first orientation. 
     
     
       67. The element of claim  66  wherein the first orientation is generally perpendicular to the second orientation.