Substrate polishing article

Abstract

A polishing material for chemical mechanical polishing has a mesh of fibers and a binder material holding the fibers in the mesh. The binder material coalesced among the fibers to leave pores in the interstices between the fibers of the mesh. The fibers and binder material provide the polishing material with a brittle texture. The fibers can be cellulose, and the binder material can be a phenolic resin.

What is claimed is:  
     
       1. A method of chemical mechanical polishing, comprising: 
       bringing a substrate into contact with a material that includes a mesh of fibers and a brittle binder holding the fibers in the mesh, the binder coalesced among the fibers to leave pores in the interstices between the fibers of the mesh, wherein the fibers and binder provide the material with a brittle structure;  
       supplying a polishing liquid to the interface between the substrate and the material; and  
       creating relative motion between the substrate and the material.  
     
     
       2. The method of  claim 1 , wherein the material formed by the fibers and binder has a tensile modulus greater than about 10 5  psi. 
     
     
       3. The method of  claim 2 , wherein the tensile modulus is greater than about 3×10 5  psi. 
     
     
       4. The method of  claim 1 , wherein the material formed by the fibers and binder elongates less than about 5% before breaking. 
     
     
       5. The method of  claim 4 , wherein the material elongates less than about 2% before breaking. 
     
     
       6. The method of  claim 5 , wherein the material elongates less than about 1% before breaking. 
     
     
       7. The method of  claim 1 , wherein the material undergoes elastic deformation during compression. 
     
     
       8. The method of  claim 1 , wherein the fibers include cellulose. 
     
     
       9. The method of  claim 8 , wherein the fibers are formed from linen, cotton or wood. 
     
     
       10. The method of  claim 8 , wherein the fibers are formed from cotton. 
     
     
       11. The method of  claim 1 , wherein the fibers include a polyamide. 
     
     
       12. The method of  claim 10 , wherein the fibers are formed from Aramid. 
     
     
       13. The method of  claim 1 , wherein the binder includes a resin. 
     
     
       14. The method of  claim 13 , wherein the resin includes a phenolic resin. 
     
     
       15. The method of  claim 1 , wherein the ratio of fibers to binder in the material is about 1:1 to 2:1 by weight. 
     
     
       16. The method of  claim 1 , wherein the pores occupy about half of the volume of the material. 
     
     
       17. The method of  claim 1 , wherein the fibers are oriented substantially randomly throughout the material. 
     
     
       18. The method of  claim 1 , wherein the material includes one or more of the following: graphite, calcium celite, and an elastomer. 
     
     
       19. The method of  claim 1 , wherein the material is sufficient brittle that lateral force created by relative motion between the substrate and the polishing surface tends to cause fragments of the fibers and binder material at the surface to break away from the layer of polishing material. 
     
     
       20. The method of  claim 1 , wherein the material has an average yield point and an average tensile strength that differ by less than 5%. 
     
     
       21. The method of  claim 20 , Wherein the material has an average yield point and an average tensile strength that differ by less than 1%. 
     
     
       22. A method of chemical mechanical polishing, comprising: 
       bringing a substrate into contact with a material that includes a mesh of cellulose fibers and a phenolic resin binding the fibers in the mesh, the resin coalesced around the fibers to leave pores in the interstices between the fibers of the mesh;  
       supplying a polishing liquid to the interface between the substrate and the material; and  
       creating relative motion between the substrate and the material.  
     
     
       23. The method of  claim 22 , wherein the material formed by the fibers and binder elongates less than about 1% before breaking. 
     
     
       24. A method of chemical mechanical polishing, comprising: 
       bringing a substrate into contact with a material that includes a mesh of fibers and a binder holding the fibers in the mesh, the binder coalesced among the fibers to leave pores in the interstices between the fibers of the mesh, wherein the fibers and binder provide the material with an average yield point and an average tensile strength that substantially equal;  
       supplying a polishing liquid to the interface between the substrate and the material; and  
       creating relative motion between the substrate and the material.  
     
     
       25. A method of chemical mechanical polishing, comprising: 
       bringing a substrate into contact with a material that includes a mesh of cotton fibers and a phenolic resin binding the fibers in the mesh, the resin coalesced around the fibers to leave pores in the interstices between the fibers of the mesh;  
       supplying a polishing liquid to the interface between the substrate and the material; and  
       creating relative motion between the substrate and the material.