P
US6635868B2ExpiredUtilityPatentIndex 73

Mass spectrometry apparatus

Assignee: ANELVA CORPPriority: Mar 24, 2000Filed: Mar 23, 2001Granted: Oct 21, 2003
Est. expiryMar 24, 2020(expired)· nominal 20-yr term from priority
Inventors:SHIOKAWA YOSHIRONAKAMURA MEGUMIFUJII TOSHIHIRO
H01J 49/145H01J 49/107H01J 49/147
73
PatentIndex Score
11
Cited by
10
References
14
Claims

Abstract

A mass spectrometry apparatus is provided with a mass spectrometry mechanism for analyzing the mass of ionized detected gas. The mass spectrometry apparatus is further provided with two ion sources, that is, a first ion source for attaching positive charge metal ions to cause ionization, and a second ion source for causing electrons to impact to cause ionization. Based on the configuration, it becomes possible to simultaneously or separately measure the molecular weight and analyze the molecular structure of the detected gas with a high sensitivity. The second ion source is positioned between the first ion source and the mass spectrometry mechanism and the detected gas is introduced into the first ion source. According to the above mass spectrometry apparatus, it is possible to measure the accurate molecular weight of the detected gas with a sufficient sensitivity and to simultaneously analyze the molecular structure with a sufficient sensitivity.

Claims

exact text as granted — not AI-modified
What is claimed is:  
     
       1. A mass spectrometry apparatus including an ion source for ionizing a detected gas, a mass spectrometry mechanism for analyzing the mass of the ionized detected gas, and a vacuum pump for evacuating both insides of the ion source and the mass spectrometry mechanism, 
       said mass spectrometry apparatus further comprising:  
       a first ion source for attaching positive charge metal ions to the molecules of the detected gas to ionize the detected gas, and  
       a second ion source for causing electrons to impact the molecules of the detected gas for ionization,  
       wherein said first ion source and said second ion source being provided independently.  
     
     
       2. A mass spectrometry apparatus as set forth in  claim 1 , wherein said second ion source is positioned between said first ion source and said mass spectrometry mechanism and said detected gas is introduced to said first ion source. 
     
     
       3. A mass spectrometry apparatus as set forth in  claim 2 , wherein a partition with an ion passage port through which the ionized detected gas passes is provided between said second ion source and said mass spectrometry mechanism, and each of said second ion source and said mass spectrometry mechanism is evacuated by an independent vacuum pump. 
     
     
       4. A mass spectrometry apparatus as set forth in  claim 3 , wherein said second ion source is arranged near said ion passage port of said partition. 
     
     
       5. A mass spectrometry apparatus as set forth in  claim 2 , wherein a partition with an ion passage port through which the ionized detected gas passes is provided between said first ion source and said second ion source, and each of said first ion source and said second ion source is evacuated by an independent vacuum pump. 
     
     
       6. A mass spectrometry apparatus as set forth in  claim 5 , wherein said partition provided between said first ion source and said second ion source is closed except for said ion passage port. 
     
     
       7. A mass spectrometry apparatus as set forth in  claim 2 , wherein partitions with ion passage ports through which the ionized detected gas passes are provided between said first ion source and said second ion source and between said second ion source and said mass spectrometry mechanism, and each of said first ion source, second ion source, and mass spectrometry mechanism is evacuated by an independent vacuum pump. 
     
     
       8. A mass spectrometry apparatus as set forth in  claim 1 , wherein said mass spectrometry mechanism is an ion trap type and has an internal ionization mechanism combined with said second ion source. 
     
     
       9. A mass spectrometry apparatus as set forth in  claim 8 , wherein a partition with an ion passage port through which an ionized detected gas passes is provided between said first ion source and said mass spectrometry mechanism, and each of said first ion source and said mass spectrometry mechanism is evacuated by an independent vacuum pump. 
     
     
       10. A mass spectrometry apparatus as set forth in  claim 9 , wherein said partition provided between said first ion source and said mass spectrometry mechanism is closed except for said ion passage port. 
     
     
       11. A mass spectrometry apparatus as set forth in  claim 1 , wherein a gas ejected from a gas chromatograph or liquid chromatograph is introduced into said first ion source. 
     
     
       12. A mass spectrometry apparatus as set forth in  claim 1 , wherein the metal ions are any of Li + , K + , Na + , Rb + , Cs + , Al + , Ga + , and In + . 
     
     
       13. A mass spectrometry apparatus as set forth in  claim 1 , wherein a pressure during the operation of said first ion source is in the range of 1 to 500 Pa. 
     
     
       14. A mass spectrometry apparatus as set forth in  claim 1 , wherein a pressure during the operation of said second ion source is not more than 1×10 31 1  Pa.

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