Probe card

Abstract

The present invention provides a probe card that can examine an object with small electrode spacing. A probe supporting plate is provided to a lower face side of a printed wiring board of a probe card. A plurality of probes are supported by the probe supporting plate. The probes comprise an upper contact, a lower contact, and a main body portion. An upper end portion of the upper contact protrudes toward an upper side of the probe supporting plate and contacts a terminal of the printed wiring board. A lower end portion of the lower contact protrudes toward a lower side of the probe supporting plate. On the probe supporting plate, a through-hole and a concave portion are formed to lock the probes, and the probes can be inserted and removed freely against the probe supporting plate from above.

1. A probe card comprising;
 a circuit board structured to transmit an electric signal to a plurality of probes; 
 a probe supporting plate located on a lower face side of said circuit board with a plurality of probes inserted in a vertical direction; and 
 a connecting plate positioned between said circuit board and said probe supporting plate to electrically connect said circuit board and each probe on said probe supporting plate; 
 wherein on the probe supporting plate, an upper end portion of each of said plurality of probes protrudes upward of said probe supporting; 
 a lower end portion of each of said plurality of probes protrudes downward of said probe supporting plate, 
 wherein each of said plurality of probes comprises at least an upper portion, a main body portion and a lower portion, where the main body portion comprises a connecting portion with the upper portion positioned substantially at a middle of the connecting portion; 
 wherein said main body portion deflects when said upper portion contacts said circuit board; 
 wherein a groove is formed on a lower face side of said probe supporting plate, and a through-hole is formed on a bottom face of said groove; 
 wherein a plurality of concave portions are formed along said groove on a lower face adjacent to said groove on said probe supporting plate; 
 wherein each probe comprises a locking portion to lock said probe to said probe supporting plate; and 
 a concave portion is formed on said locking portion. 
 
   
   
     2. The probe card according to  claim 1 , wherein said locking portion of each probe is adhered to said concave portion with a resin curable by light or heat. 
   
   
     3. The probe card according to  claim 1 , wherein each of said adjacent concave portions is formed at a different distance from said groove. 
   
   
     4. The probe card according to  claim 1 , wherein said main body portion of said probe comprises either a corrugate or a rectangular shape. 
   
   
     5. The probe card according to  claim 1 , wherein said locking portion of each probe is attached to a joint portion of said main body portion and a lower portion. 
   
   
     6. The probe card according to  claim 5 , wherein said lower portion of said probe comprises a perpendicular portion having said lower end portion; and
 a beam portion formed in a horizontal direction from said lower portion of said main body portion and connected to said perpendicular portion at a top end of the probe.