Apparatus and method for removing bubbles from a process liquid

Abstract

The present invention is directed to methods and apparatuses for removing bubbles from a process liquid. The process liquid can comprise a plating solution used in a plating tool. The process liquid is supplied to a tank. A plurality of streams of the process liquid are directed towards a surface of the process liquid from below. This can be done by feeding the process liquid to a flow distributor comprising a plurality of openings providing flow communication between an inner volume of the flow distributor and a main volume of the tank. Before leaving the tank through an outlet, the process liquid flows through a flow barrier.

1. A method of removing bubbles from a process liquid, comprising:
 supplying said process liquid to a tank, said supply of said process liquid comprising directing a plurality of flows of said process liquid towards a surface of said process liquid from below, wherein supplying said process liquid comprises feeding said process liquid to a flow distributor comprising a plurality of openings providing flow communication between an inner volume of said flow distributor and a main volume of said tank; and 
 flowing said process liquid out of said tank, wherein said process liquid passes a flow barrier and flows through at least one outlet provided below said flow barrier. 
 
     
     
       2. The method of  claim 1 , wherein flowing said process liquid out of said tank comprises pumping said process liquid. 
     
     
       3. The method of  claim 1 , wherein said flow barrier is located below said flow distributor. 
     
     
       4. The method of  claim 1 , further comprising providing said flow distributor below a surface of said process liquid. 
     
     
       5. The method of  claim 4 , wherein a distance between said flow distributor and said surface of said process liquid is maintained in a range from about 5-30 cm. 
     
     
       6. The method of  claim 1 , further comprising collecting said process liquid in an accumulator providing flow communication between an inlet area of said tank and said flow distributor. 
     
     
       7. The method of  claim 1 , wherein said process liquid is supplied from a process chamber of a plating tool. 
     
     
       8. The method of  claim 1 , wherein said process liquid pumped out of said main volume is supplied to a process chamber of a plating tool. 
     
     
       9. A method of removing bubbles from a process liquid, comprising:
 supplying said process liquid to a tank, said supply of said process liquid comprising directing a plurality of flows of said process liquid towards a surface of said process liquid from below; and 
 flowing said process liquid out of said tank, wherein said process liquid passes a flow barrier and flows through at least one outlet provided below said flow barrier, wherein flowing said process liquid out of said tank comprises pumping said process liquid. 
 
     
     
       10. The method of  claim 9 , wherein said process liquid is supplied from a process chamber of a plating tool. 
     
     
       11. The method of  claim 9 , wherein said process liquid pumped out of said tank is supplied to a process chamber of a plating tool. 
     
     
       12. A method of removing bubbles from a process liquid, comprising:
 supplying said process liquid to a tank, said supply of said process liquid comprising directing a plurality of flows of said process liquid towards a surface of said process liquid from below, wherein said process liquid is supplied from a process chamber of a plating tool; and 
 flowing said process liquid out of said tank, wherein said process liquid passes a flow barrier and flows through at least one outlet provided below said flow barrier. 
 
     
     
       13. A method of removing bubbles from a process liquid, comprising:
 supplying said process liquid to a tank, said supply of said process liquid comprising directing a plurality of flows of said process liquid towards a surface of said process liquid from below; and 
 pumping said process liquid out of a main volume of said tank, wherein said process liquid passes a flow baffler and flows through at least one outlet provided below said flow barrier and wherein said process liquid pumped out of said main volume is supplied to a process chamber of a plating tool. 
 
     
     
       14. The method of  claim 1 , wherein said process liquid passes through said flow barrier and flows through said at least one outlet. 
     
     
       15. The method of  claim 14 , wherein said process liquid passes through a plurality of openings in said flow barrier. 
     
     
       16. The method of  claim 9 , wherein said process liquid passes through said flow barrier and flows through said at least one outlet. 
     
     
       17. The method of  claim 16 , wherein said process liquid passes through a plurality of openings in said flow barrier. 
     
     
       18. The method of  claim 12 , wherein said process liquid passes through said flow barrier and flows through said at least one outlet. 
     
     
       19. The method of  claim 18 , wherein said process liquid passes through a plurality of openings in said flow barrier. 
     
     
       20. The method of  claim 13 , wherein said process liquid passes through said flow barrier and flows through said at least one outlet. 
     
     
       21. The method of  claim 20 , wherein said process liquid passes through a plurality of openings in said flow barrier.