Fluid ejector structure

Abstract

In one embodiment, a fluid ejector structure includes an array of fluid ejector elements; an array of fluid ejection orifices, each orifice in the array positioned adjacent to a corresponding one of the fluid ejector elements; and a three dimensional array of interconnected conductors within the orifice and ejector element arrays. In another embodiment an orifice sub-structure for a fluid ejector structure includes: a substrate; an array of orifices in the substrate arranged in rows in an x direction and in columns in a y direction; and a first thin film structure that includes first conductive elements within the orifice array extending in the x direction and in the y direction.

1. A fluid ejector structure, comprising:
 an array of fluid ejector elements in a first sub-structure; 
 an array of fluid ejection orifices in a second sub-structure bonded to the first sub-structure along an interface, each orifice in the array positioned adjacent to a corresponding one of the fluid ejector elements; and 
 a three dimensional array of conductors within the orifice and ejector element arrays interconnected across the interface. 
 
     
     
       2. The structure of  claim 1 , wherein conductors in the conductor array are electrically connected to ejector elements in the ejector element array. 
     
     
       3. The structure of  claim 1 , wherein:
 the ejector elements are arrayed in a first x-y plane; 
 the orifices are arrayed in a second x-y plane spaced apart from the first x-y plane; and 
 the array of interconnected conductors includes first conductors connected to the ejector elements along the first x-y plane, second conductors along the second x-y plane, and third conductors extending in a z direction across the interface connecting the first conductors and the second conductors. 
 
     
     
       4. The structure of  claim 1 , further comprising:
 an array of fluid ejection chambers, each chamber in the array associated with an ejector element and a corresponding ejection orifice such that a drop of fluid may be ejected from the chamber through the orifice at the urging of the ejector element; and 
 one or more of:
 drop detection circuitry connected to conductors in the conductor array, the drop detection circuitry having circuit elements within one or more of the fluid ejection chambers; 
 drop deflector circuitry connected to conductors in the conductor array, the drop detection circuitry having circuit elements within one or more of the fluid ejection chambers; 
 thermal sensor circuitry connected to conductors in the conductor array, the thermal sensor circuitry having circuit elements within the orifice array; and 
 puddle breaker circuitry connected to conductors in the conductor array, the puddle breaker circuitry having circuit elements within the orifice array. 
 
 
     
     
       5. A fluid ejector structure, comprising an orifice sub-structure and an ejector element sub-structure bonded together along an interface, the orifice sub-structure including:
 a plurality of orifices therein each positioned adjacent to a corresponding one of a plurality of fluid ejector elements on the ejector element sub-structure; and 
 a plurality of first conductors in the orifice sub-structure at the interface, the first conductors connected to a corresponding plurality of second conductors in the ejector element sub-structure. 
 
     
     
       6. The structure of  claim 5 , wherein the first conductors are formed in a first thin film on the orifice sub-structure at the interface and the second conductors are formed in a second thin film on the ejector element sub-structure at the interface. 
     
     
       7. The structure of  claim 5 , wherein the orifice sub-structure also includes a plurality of third conductors along an exterior part of the orifice sub-structure opposite the interface, the third conductors connected to the first conductors. 
     
     
       8. The structure of  claim 7 , wherein the orifice sub-structure also includes a plurality of fourth conductors extending through the orifice sub-structure connecting the first conductors and the third conductors. 
     
     
       9. A fluid ejector structure, comprising:
 an orifice sub-structure and an ejector element sub-structure bonded together along a generally x-y planar interface; 
 a plurality of fluid ejector elements arrayed on the ejector element sub-structure lengthwise in the x direction and crosswise in the y direction; 
 a plurality of elongated fluid supply channels in the ejector element sub-structure each extending lengthwise in an x direction between rows of fluid ejector elements; 
 a plurality of orifices arrayed in the orifice sub-structure lengthwise in the x direction and crosswise in the y direction, each orifice positioned adjacent to a corresponding one of the fluid ejector elements and each orifice operatively connected to a fluid supply channel such that fluid can flow from the fluid supply channel over a fluid ejector element to the orifice; and 
 a plurality of conductors each having a first part in the elector element sub-structure connected to a fluid ejector element, a second part in the orifice sub-structure extending in the y direction over and across a fluid supply channel, and a third part in the orifice sub-structure extending in a z direction connecting the first and second parts.