Substrate processing apparatus

Abstract

To inhibit a diffusion of particles into a processing chamber and reduce a cost required for exchanging a gas filter. A substrate processing apparatus comprises: a processing chamber processing substrates; a gas supply part supplying processing gas into the processing chamber; wherein the gas supply part has a gas supply nozzle disposed in the processing chamber; a filter removing impurities contained in the processing gas; and a gas supply port opened in the gas supply nozzle, for supplying into the processing chamber the processing gas from which impurities are removed by the filter.

1. A substrate processing apparatus, comprising:
 a processing chamber in which a substrate is processed; and 
 a gas supply part configured to supply processing gas into the processing chamber, wherein the gas supply part comprises: 
 a gas supply nozzle disposed in the processing chamber; 
 a filter disposed in the gas supply nozzle, configured to remove impurities contained in the processing gas; and 
 a gas supply port opened on the gas supply nozzle, configured to supply into the processing chamber, the processing gas from which the impurities are removed by the filter, wherein the filter comprises: 
 a tubular part disposed in the gas supply nozzle; and 
 a filter member disposed in the gas supply nozzle and connected to a downstream end of the tubular part, 
 wherein an upstream end of the tubular part is air-tightly connected to the gas supply nozzle. 
 
     
     
       2. The substrate processing apparatus according to  claim 1 , wherein a gap is provided between the filter and the gas supply port. 
     
     
       3. The substrate processing apparatus according to  claim 1 , wherein a gap is provided between an inner wall of the gas supply nozzle and an outer wall of the filter member. 
     
     
       4. The substrate processing apparatus according to  claim 1 , wherein a gap of 3 mm or more is provided between an inner wall of the gas supply nozzle and an outer wall of the filter member. 
     
     
       5. The substrate processing apparatus according to  claim 1 , wherein the processing gas includes a gas generated by vaporizing a liquid source. 
     
     
       6. The substrate processing apparatus according to  claim 1 , wherein a surface area or volume of the filter member is set according to an introduction amount of the processing gas supplied into the processing chamber. 
     
     
       7. The substrate processing apparatus according to  claim 1 , wherein the gas supply nozzle comprises:
 a gas introducing nozzle; and 
 a gas rectifier nozzle connected to a downstream end of the gas introducing nozzle, wherein: 
 a connection part between the gas introducing nozzle and the gas rectifier nozzle is provided inside of the processing chamber, and 
 the filter can be exchanged in the processing chamber. 
 
     
     
       8. The substrate processing apparatus according to  claim 1 , further comprising:
 a heating mechanism configured to heat a processing area of the substrate in the processing chamber, 
 wherein the filter is disposed outside the processing area. 
 
     
     
       9. The substrate processing apparatus according to  claim 1 , further comprising:
 a heating mechanism configured to heat a processing area of the substrate in the processing chamber; and 
 a shielding part configured to shield a heat radiation to the filter from the heating mechanism. 
 
     
     
       10. The substrate processing apparatus according to  claim 9 , wherein the shielding part is a masking shield provided between the heating mechanism and the filter. 
     
     
       11. A substrate processing apparatus comprising:
 a processing chamber in which a substrate is processed; 
 a loading/unloading part configured to load/unload at least one substrate into/outside the processing chamber; and 
 a gas supply part configured to introduce at least one kind of processing gas into the processing chamber, wherein the gas supply part comprises: 
 a gas supply nozzle disposed in the processing chamber; 
 a filter disposed in the gas supply nozzle, configured to remove impurities contained in the processing gas; and 
 a gas supply port opened in a part of the gas supply nozzle, configured to supply into the processing chamber, the processing gas from which the impurities are removed by the filter, wherein the filter comprises: 
 a tubular part disposed in the gas supply nozzle; and 
 a filter member disposed in the gas supply nozzle and connected to a downstream end of the tubular part, 
 wherein an upstream end of the tubular part is air-tightly connected to the gas supply nozzle. 
 
     
     
       12. The substrate processing apparatus according to  claim 9 , wherein the shielding part is formed as a part of the gas supply nozzle containing opaque quartz, provided between the heating mechanism and the filter.