Semiconductor package manufacturing method and semiconductor package

Abstract

According to one embodiment, there is provided a semiconductor package manufacturing method utilizing a support body in which a first layer is stacked on a second layer, the method including: a first step of forming an opening in the first layer to expose the second layer therethrough; a second step of arranging a semiconductor chip on the second layer through the opening; a third step of forming a resin portion on the first layer to cover the semiconductor chip; and a fourth step of forming a wiring structure on the resin portion so as to be electrically connected to the semiconductor chip.

The invention claimed is: 
     
       1. A method of manufacturing a semiconductor package utilizing a support body in which a first layer is stacked on a second layer, the method comprising:
 a first step of forming an opening in the first layer to expose the second layer therethrough; 
 a second step of arranging a semiconductor chip on the second layer through the opening; 
 a third step of forming a resin portion on the first layer to cover the semiconductor chip; 
 a fourth step of forming a wiring structure on the resin portion so as to be electrically connected to the semiconductor chip; and 
 a fifth step of at least partially removing the second layer. 
 
     
     
       2. The method of manufacturing a semiconductor package according to  claim 1 ,
 wherein an electrode terminal is formed on the first layer, 
 wherein, in the third step, a through hole is formed in the resin portion to expose the electrode terminal therethrough, and 
 wherein, in the fourth step, the wiring structure is formed to be electrically connected to the electrode terminal through the through hole. 
 
     
     
       3. The method of manufacturing a semiconductor package according to  claim 1 ,
 wherein the fifth step includes removing the first layer and the second layer. 
 
     
     
       4. The method of manufacturing a semiconductor package according to  claim 1 ,
 wherein the fifth step includes partially removing the first layer and the second layer so that parts of the first layer and the second layer remain on a surface of the resin portion, which is opposite to a surface touching the wiring structure, as a frame-like portion, the frame-like portion surrounding the semiconductor chip and the electrode terminal. 
 
     
     
       5. The method of manufacturing a semiconductor package according to  claim 1 ,
 wherein the first layer is made of copper or copper alloy, and 
 wherein the second layer is made of nickel or nickel alloy. 
 
     
     
       6. The method of manufacturing a semiconductor package according to  claim 1 ,
 wherein the first layer is made of copper or copper alloy, and 
 wherein the second layer is made of a resin. 
 
     
     
       7. The method of manufacturing a semiconductor package according to  claim 1 ,
 wherein the wiring structure includes an electrode pad. 
 
     
     
       8. The method of manufacturing a semiconductor package according to  claim 1 ,
 wherein the wiring structure includes plural wiring layers and plural insulating layers which are alternately stacked. 
 
     
     
       9. The method of manufacturing a semiconductor package according to  claim 1 ,
 wherein, in the fourth step,
 openings are formed in the resin portion to expose an electrode pad of the semiconductor chip and an electrode terminal formed on the first layer, respectively, and 
 a wiring layer is formed on the resin portion as a part of the wiring structure so as to be connected to the electrode pad and the electrode terminal through the openings, respectively. 
 
 
     
     
       10. A semiconductor package comprising:
 a semiconductor chip including a circuit forming surface, a side surface and an back surface opposite to the circuit forming surface; 
 a resin portion including a body part which covers the circuit forming surface of the semiconductor chip and a side wall part which covers the side surface of the semiconductor chip, the resin portion covering the semiconductor chip such that the back surface of the semiconductor chip protrudes from one surface of the body part, the side wall part having a tapered shape; and 
 a wiring structure formed on the other surface of the body part of the resin portion so as to be electrically connected to the semiconductor chip. 
 
     
     
       11. The semiconductor package of  claim 10 , further comprising:
 an electrode terminal formed on the one surface of the body part which is electrically connected to the wiring structure. 
 
     
     
       12. The semiconductor package of  claim 11 , further comprising:
 a frame-like portion formed on the one surface of the body part to surround the semiconductor chip and the electrode terminal. 
 
     
     
       13. The semiconductor package of  claim 10 , further comprising:
 a first layer formed on the one surface of the body part to touch the side wall part. 
 
     
     
       14. The semiconductor package of  claim 13 ,
 wherein a surface of the first layer, which is opposite to a surface touching the body part, is flush with the back surface of the semiconductor chip, and 
 wherein there is further provided a second layer formed on the surface of the first layer and the back surface of the semiconductor chip. 
 
     
     
       15. The semiconductor package of  claim 10 ,
 wherein the wiring structure includes an electrode pad. 
 
     
     
       16. The semiconductor package of  claim 10 ,
 wherein the wiring structure includes plural wiring layers and plural insulating layers which are alternately stacked. 
 
     
     
       17. The semiconductor package of  claim 10 ,
 wherein an electrode pad is formed on the circuit forming surface of the semiconductor chip, 
 wherein an electrode terminal is formed on one surface of the body part, 
 wherein openings are formed in the resin portion to expose the electrode pad and the electrode terminal, and 
 wherein the wiring structure includes a wiring layer which is formed on the resin portion so as to be connected to the electrode pad and the electrode terminal through the openings, respectively.