USD1012051SActiveUtility

Electrostatic chuck for semiconductor manufacturing device

Assignee: TOKYO ELECTRON LTDPriority: Jun 17, 2019Filed: Dec 5, 2019Granted: Jan 23, 2024

Est. expiryJun 17, 2039(~12.9 yrs left)· nominal 20-yr term from priority

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Claims

exact text as granted — not AI-modified

CLAIM 
     
       The ornamental design for an electrostatic chuck for semiconductor manufacturing device, as shown and described.

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