USD1053156SActiveUtility

Furnace for substrate processing apparatus

58
Assignee: KOKUSAI ELECTRIC CORPPriority: Mar 15, 2022Filed: Aug 8, 2022Granted: Dec 3, 2024
Est. expiryMar 15, 2042(~15.7 yrs left)· nominal 20-yr term from priority
Inventors:Hideto TatenoTakatomo YamaguchiDaiki Kimoto
58
PatentIndex Score
2
Cited by
27
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a furnace for substrate processing apparatus, as shown and described.

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