USD323628SExpiredUtility

Semiconductor wafer measuring instrument

36
Assignee: TOKYO ELECTRON LTDPriority: Apr 25, 1989Filed: Apr 25, 1989Granted: Feb 4, 1992
Est. expiryApr 25, 2009(expired)· nominal 20-yr term from priority
Inventors:Itaru Takao
36
PatentIndex Score
2
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13
References
1
Claims

Claims

exact text as granted — not AI-modified
The ornamental design for a semiconductor wafer measuring instrument, as shown and described.

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