USD420023SExpiredUtility

Electrostatic chuck with improved spacing mask and workpiece detection device

65
Assignee: APPLIED MATERIALS INCPriority: Jan 9, 1999Filed: Jan 9, 1999Granted: Feb 1, 2000
Est. expiryJan 9, 2019(expired)· nominal 20-yr term from priority
Inventors:Allen FlaniganSteven V. SansoniVincent E. Burkhart
65
PatentIndex Score
13
Cited by
4
References
1
Claims

Claims

exact text as granted — not AI-modified
The ornamental design for an electrostatic chuck with improved spacing mask and workpiece detection device, as shown.

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