Inventor · disambiguated record
Allen Flanigan
Also filed as: FLANIGAN ALLEN
11 granted patents·1 pending application·642 citations·filing 1996–2001
93Inventor score
Files withAPPLIED MATERIALS INC10
Top patents by PatentIndex Score
12 records- 0197US6081414AApparatus for improved biasing and retaining of a workpiece in a workpiece processing systemAPPLIED MATERIALS INC·Filed 1998·Granted Jun 27, 2000·333 cites·24 claims
- 0291US6051122ADeposition shield assembly for a semiconductor wafer processing systemAPPLIED MATERIALS INC·Filed 1997·Granted Apr 18, 2000·123 cites·20 claims
- 0386USD420022SElectrostatic chuck with improved spacing and charge migration reduction maskAPPLIED MATERIALS INC·Filed 1997·Granted Feb 1, 2000·31 cites·1 claims
- 0477US6508062B2Thermal exchanger for a wafer chuckAPPLIED MATERIALS INC·Filed 2001·Granted Jan 21, 2003·20 cites·21 claims
- 0576USD407073SElectrostatic chuck with improved spacing and charge migration reduction maskAPPLIED MATERIALS INC·Filed 1997·Granted Mar 23, 1999·20 cites·1 claims
- 0666US6053756AInterlock safety deviceAPPLIED MATERIALS INC·Filed 1998·Granted Apr 25, 2000·32 cites·20 claims
- 0765USD420023SElectrostatic chuck with improved spacing mask and workpiece detection deviceAPPLIED MATERIALS INC·Filed 1999·Granted Feb 1, 2000·13 cites·1 claims
- 0863USD406852SElectrostatic chuck with improved spacing mask and workpiece detection deviceAPPLIED MATERIALS INC·Filed 1997·Granted Mar 16, 1999·12 cites·1 claims
- 0960US5863396AMethod and apparatus for fabricating a wafer spacing mask on a substrate support chuckAPPLIED MATERIALS INC·Filed 1996·Granted Jan 26, 1999·22 cites·10 claims
- 1059US5863340ADeposition ring anti-rotation apparatusFiled 1996·Granted Jan 26, 1999·23 cites·9 claims
- 1153US6258227B1Method and apparatus for fabricating a wafer spacing mask on a substrate support chuckAPPLIED MATERIALS INC·Filed 1999·Granted Jul 10, 2001·13 cites·13 claims
- 1244US2001030124A1Method and apparatus for fabricating a wafer spacing mask on a substrate support chuckFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →