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Process tube for semiconductor device manufacturing apparatus

68
Assignee: TOKYO ELECTRON LTDPriority: Nov 4, 2003Filed: Apr 29, 2004Granted: May 23, 2006
Est. expiryNov 4, 2023(expired)· nominal 20-yr term from priority
Inventors:Katsutoshi IshiiHiroyuki Matsuura
68
PatentIndex Score
15
Cited by
8
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a process tube for semiconductor device manufacturing apparatus, as shown and described.

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