USD521465SExpiredUtility

Process tube for semiconductor device manufacturing apparatus

Assignee: TOKYO ELECTRON LTDPriority: Nov 4, 2003Filed: Apr 29, 2004Granted: May 23, 2006

Est. expiryNov 4, 2023(expired)· nominal 20-yr term from priority

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Claims

exact text as granted — not AI-modified

CLAIM 
     
       The ornamental design for a process tube for semiconductor device manufacturing apparatus, as shown and described.

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