USD564462SExpiredUtility

RF electrode for a process tube of semiconductor manufacturing apparatus

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Assignee: TOKYO ELECTRON LTDPriority: Dec 27, 2005Filed: Jun 2, 2006Granted: Mar 18, 2008
Est. expiryDec 27, 2025(expired)· nominal 20-yr term from priority
Inventors:Katsutoshi IshiiHiroyuki Matsuura
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PatentIndex Score
6
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5
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1
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Claims

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CLAIM 
     
       The ornamental design for a RF electrode for a process tube of semiconductor manufacturing apparatus, as shown and described.

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