USD570310SActiveUtility

Attracting plate of an electrostatic chuck for semiconductor manufacturing

77
Assignee: TOKYO ELECTRON LTDPriority: Aug 1, 2006Filed: Feb 1, 2007Granted: Jun 3, 2008
Est. expiryAug 1, 2026(~0 yrs left)· nominal 20-yr term from priority
Inventors:Yasuharu Sasaki
77
PatentIndex Score
22
Cited by
9
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for an attracting plate of an electrostatic chuck for semiconductor manufacturing, as shown and described.

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