USD571832SExpiredUtility

Top panel for microwave introduction window of a plasma processing apparatus

66
Assignee: TOKYO ELECTRON LTDPriority: Jul 29, 2005Filed: Jan 30, 2006Granted: Jun 24, 2008
Est. expiryJul 29, 2025(expired)· nominal 20-yr term from priority
Inventors:Kinya OtaCai Zhong TianJunichi Kitagawa
66
PatentIndex Score
15
Cited by
29
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a top panel for microwave introduction window of a plasma processing apparatus, as show and described.

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