Inventor · disambiguated record
Cai Zhong Tian
Also filed as: TIAN CAI ZHONG
15 granted patents·1 pending application·1,373 citations·filing 2005–2011
93Inventor score
Top patents by PatentIndex Score
16 records- 0198USD593585STop panel for microwave introduction window of a plasma processing apparatusTOKYO ELECTRON LTD·Filed 2006·Granted Jun 2, 2009·424 cites·1 claims
- 0298USD571831STop panel for microwave introduction window of a plasma processing apparatusTOKYO ELECTRON LTD·Filed 2006·Granted Jun 24, 2008·437 cites·1 claims
- 0398USD571383STop panel for microwave introduction window of a plasma processing apparatusTOKYO ELECTRON LTD·Filed 2006·Granted Jun 17, 2008·431 cites·1 claims
- 0479USD572733STop panel for microwave introduction window of a plasma processing apparatusTOKYO ELECTRON LTD·Filed 2006·Granted Jul 8, 2008·26 cites·1 claims
- 0578USD571833STop panel for microwave introduction window of plasma processing apparatusTOKYO ELECTRON LTD·Filed 2006·Granted Jun 24, 2008·24 cites·1 claims
- 0674US7993488B2Microwave plasma processing device and gate valve for microwave plasma processing deviceTOKYO ELECTRON LTD·Filed 2007·Granted Aug 9, 2011·4 cites·12 claims
- 0766USD571832STop panel for microwave introduction window of a plasma processing apparatusTOKYO ELECTRON LTD·Filed 2006·Granted Jun 24, 2008·15 cites·1 claims
- 0844US2005188922A1Plasma processing unitTOKYO ELECTRON LTD·Filed 2005·Application pending·0 cites
- 0940US8293067B2Microwave plasma processing device and gate valve for microwave plasma processing deviceMURAOKA SUNAO·Filed 2011·Granted Oct 23, 2012·0 cites·6 claims
- 1038US8267040B2Plasma processing apparatus and plasma processing methodISHIBASHI KIYOTAKA·Filed 2005·Granted Sep 18, 2012·0 cites·2 claims
- 1137USD594485STop panel for microwave introduction window of a plasma processing apparatusTOKYO ELECTRON LTD·Filed 2006·Granted Jun 16, 2009·3 cites·1 claims
- 1236USD563950SMicrowave introducing antenna for a plasma processing apparatusTOKYO ELECTRON LTD·Filed 2007·Granted Mar 11, 2008·3 cites·1 claims
- 1334USD589034SMicrowave introducing antenna for a plasma processing apparatusTOKYO ELECTRON LTD·Filed 2007·Granted Mar 24, 2009·2 cites·1 claims
- 1434USD563951SMicrowave introducing antenna for a plasma processing apparatusTOKYO ELECTRON LTD·Filed 2007·Granted Mar 11, 2008·2 cites·1 claims
- 1534USD563949SMicrowave introducing antenna for a plasma processing apparatusTOKYO ELECTRON LTD·Filed 2007·Granted Mar 11, 2008·2 cites·1 claims
- 1630USD572707SMicrowave introducing antenna for a plasma processing apparatusTOKYO ELECTRON LTD·Filed 2007·Granted Jul 8, 2008·0 cites·1 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →