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Microwave introducing antenna for a plasma processing apparatus

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Assignee: TOKYO ELECTRON LTDPriority: Dec 15, 2006Filed: Jun 14, 2007Granted: Jul 8, 2008
Est. expiryDec 15, 2026(~0.4 yrs left)· nominal 20-yr term from priority
Inventors:Jun YamashitaCai Zhong Tian
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Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a microwave introducing antenna for a plasma processing apparatus, as shown and described.

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