USD589034SActiveUtility

Microwave introducing antenna for a plasma processing apparatus

34
Assignee: TOKYO ELECTRON LTDPriority: Dec 15, 2006Filed: Jun 14, 2007Granted: Mar 24, 2009
Est. expiryDec 15, 2026(~0.4 yrs left)· nominal 20-yr term from priority
Inventors:Atsushi UedaCai Zhong Tian
34
PatentIndex Score
2
Cited by
17
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a microwave introducing antenna for a plasma processing apparatus, as shown.

Join the waitlist — get patent alerts

Track USD589034S — get alerts on status changes and closely related new filings.

We store only your email — no account needed. See our privacy policy.