USD592230SActiveUtility

Wafer carrying-in/out machine

47
Assignee: TOKYO ELECTRON LTDPriority: May 16, 2007Filed: Nov 16, 2007Granted: May 12, 2009
Est. expiryMay 16, 2027(~0.8 yrs left)· nominal 20-yr term from priority
Inventors:Hiroki HosakaShuji AkiyamaTadashi Obikane
47
PatentIndex Score
6
Cited by
6
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a wafer carrying-in/out machine, as shown and described.

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